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Volumn 3514, Issue , 1998, Pages 82-89
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Vacuum maintenance in hermetically sealed MEMs packages
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Author keywords
[No Author keywords available]
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Indexed keywords
DEGASSING;
ELECTRONICS PACKAGING;
GETTERS;
SINTERING;
SORPTION;
THICK FILMS;
VACUUM;
HIGH POROSITY THICK FILMS (HPTF);
MICROELECTROMECHANICAL DEVICES;
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EID: 0032304947
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (8)
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References (6)
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