Fiber textures of titanium nitride and hafnium nitride thin films deposited by off-normal incidence magnetron sputtering

Journal of Applied Physics

Volumn 104, Issue 6, 2008, Pages

  Deniz, D ^a   Harper, J M E ^a  

^a University of New Hampshire   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 54749122494     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2980325     Document Type: Article

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