Energetic oxygen particles in the reactive sputtering of Zn targets in Ar/O2 atmospheres

Thin Solid Films

Volumn 343-344, Issue 1-2, 1999, Pages 81-84

  Tominaga, K ^a   Murayama, T ^a   Sato, Y ^a   Mori, I ^a  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

Author keywords

Energetic oxygen atoms and ions; Reactive sputtering; ZnO

Indexed keywords

ARGON; MAGNETRON SPUTTERING; OXIDATION; OXYGEN; PARTIAL PRESSURE; PRESSURE EFFECTS; SPUTTER DEPOSITION; ZINC; ZINC OXIDE;

REACTIVE SPUTTERING;

METALLIC FILMS;

EID: 0032650291     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01579-X     Document Type: Article

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