Low-temperature growth of silicon nanotubes and nanowires on amorphous substrates

ACS Nano

Volumn 4, Issue 4, 2010, Pages 1805-1812

  Mbenkum, Beri N ^a,b   Schneider, Andreas S ^a   Schütz, Gisela ^a   Xu, C ^c   Richter, Gunther ^a   Van Aken, Peter A ^a   Majer, Günter ^a,b   Spatz, Joachim P ^a,b  

^a MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS   (Germany)

^b UNIVERSITY OF HEIDELBERG   (Germany)

^c OXFORD INSTRUMENTS PLASMA TECHNOLOGY   (United Kingdom)

Author keywords

Chemical vapor deposition; Nanoparticles; Nanotubes; Nanowires

Indexed keywords

1D STRUCTURES; AMORPHOUS SUBSTRATE; CATALYTIC ACTIVITY; LOW TEMPERATURE GROWTH; NANOELECTRONIC DEVICES; OXYGEN PLASMAS; SI NANOWIRE; SI SUBSTRATES; SILICON NANOTUBES; VERTICAL ALIGNMENT;

BOROSILICATE GLASS; BUILDING MATERIALS; CHEMICAL VAPOR DEPOSITION; CONSTRUCTION EQUIPMENT; GOLD; GOLD DEPOSITS; NANOELECTRONICS; NANOPARTICLES; NANOTUBES; NANOWIRES; OXYGEN; SILICON COMPOUNDS; SILICON OXIDES;

AMORPHOUS SILICON;

GOLD; METAL NANOPARTICLE; MONOSILANE; NANOTUBE; NANOWIRE; SILANE DERIVATIVE; SILICATE; SILICON;

ADSORPTION; ARTICLE; CATALYSIS; CHEMISTRY; MICELLE; SCANNING ELECTRON MICROSCOPY; TEMPERATURE; TRANSMISSION ELECTRON MICROSCOPY;

ADSORPTION; CATALYSIS; GOLD; METAL NANOPARTICLES; MICELLES; MICROSCOPY, ELECTRON, SCANNING; MICROSCOPY, ELECTRON, TRANSMISSION; NANOTUBES; NANOWIRES; SILANES; SILICATES; SILICON; TEMPERATURE;

EID: 77951742752     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn900969y     Document Type: Article

References (56)

1. Chen, L. J. Silicon Nanowires: The Key Building Block for Future Electronic Devices J. Mater. Chem. 2007, 17, 4639-4643
2. Nagesha, D. K.; Whitehead, M. A.; Coffer, J. L. Biorelevant Calcification and Non-cytotoxic Behavior in Silicon Nanowires Adv. Mater. 2005, 17, 921-924
3. Hong, K. H.; Kim, J.; Lee, S. H.; Shin, J. K. Strain-Driven Electronic Band Structure Modulation of Si Nanowires Nano Lett. 2008, 8, 1335-1340
4. Hsin, C. L.; Mai, W. J.; Gu, Y. D.; Gao, Y. F.; Huang, C. T.; Liu, Y. Z.; Chen, L. J.; Wang, Z. L. Elastic Properties and Buckling of Silicon Nanowires Adv. Mater. 2008, 20, 3919-3923
5. Il Park, W.; Zheng, G. F.; Jiang, X. C.; Tian, B. Z.; Lieber, C. M. Controlled Synthesis of Millimeter-Long Silicon Nanowires with Uniform Electronic Properties Nano Lett. 2008, 8, 3004-3009
6. Zhang, Z. Y.; Wu, X. L.; Shen, J. C.; Yang, L. W.; Shi, Y.; Chu, P. K.; Siu, G. G. Light Emission from As-Prepared and Oxidized Si Nanowires with Diameters of 5-15 nm J. Cryst. Growth 2005, 285, 620-626
7. Zheng, Y.; Rivas, C.; Lake, R.; Alam, K.; Boykin, T. B.; Klimeck, G. Electronic Properties of Silicon Nanowires IEEE Trans. Electron Devices 2005, 52, 1097-1103
8. Zhang, Z. H.; Liu, H. M.; Xiong, Y. Q.; Xu, W. J.; Tang, Y. H. UV-Vis Absorption and PL Properties of Self-Assembled Silicon Nanotubes Chin. Phys. Lett. 2007, 24, 543-545
9. Lan, J. H.; Cheng, D. J.; Cao, D. P.; Wang, W. C. Silicon Nanotube as a Promising Candidate for Hydrogen Storage: From the First Principle Calculations to Grand Canonical Monte Carlo Simulations J. Phys. Chem. C 2008, 112, 5598-5604
10. Patolsky, F.; Zheng, G. F.; Lieber, C. M. Nanowire-Based Biosensors Anal. Chem. 2006, 78, 4260-4269
11. Wanekaya, A. K.; Chen, W.; Myung, N. V.; Mulchandani, A. Nanowire-Based Electrochemical Biosensors Electroanalysis 2006, 18, 533-550
12. Goncher, G.; Noice, L.; Solanki, R. Bulk Heterojunction Organic-Inorganic Photovoltaic Cells Based on Doped Silicon Nanowires J. Exp. Nanosci. 2008, 3, 77-86
13. 2/Si Nanowires for Molecule Detection Jpn. J. Appl. Phys. 2005, 44, 2864-2867
14. Teo, B. K. Doing Chemistry on Low-Dimensional Silicon Surfaces: Silicon Nanowires as Platforms and Templates Coord. Chem. Rev. 2003, 246, 229-246
15. Xu, S. W.; Lu, Y.; Jiang, Z. Y.; Wu, H. Silica Nanotubes-Doped Alginate Gel for Yeast Alcohol Dehydrogenase Immobilization J. Mol. Catal. B 2006, 43, 68-73
16. Lu, J. Q.; Yi, S. S. Uniformly Sized Gold Nanoparticles Derived from PS- b -P2VP Block Copolymer Templates for the Controllable Synthesis of Si Nanowires Langmuir 2006, 22, 3951-3954
17. Buttner, C. C.; Zakharov, N. D.; Pippel, E.; Gosele, U.; Werner, P. Gold-Enhanced Oxidation of MBE-Grown Silicon Nanowires Semicond. Sci. Technol. 2008, 23, 075040
18. Hannon, J. B.; Kodambaka, S.; Ross, F. M.; Tromp, R. M. The Influence of the Surface Migration of Gold on the Growth of Silicon Nanowires Nature 2006, 440, 69-71
19. Buffat, P.; Borel, J. P. Size Effect on Melting Temperature of Gold Particles Phys. Rev. A 1976, 13, 2287-2298
20. Jiang, Q.; Lu, H. M. Size Dependent Interface Energy and Its Applications Surf. Sci. Rep. 2008, 63, 427-464
21. Bahloul-Hourlier, D.; Perrot, P. Thermodynamics of the AüSi-O System: Application to the Synthesis and Growth of Silicon-Silicon Dioxide Nanowires J. Phase Equilib. Diffus. 2007, 28, 150-157
22. Qi, P. F.; Wong, W. S.; Zhao, H. Z.; Wang, D. W. Low-Temperature Synthesis of Si Nanowires Using Multizone Chemical Vapor Deposition Methods Appl. Phys. Lett. 2008, 93, 163101
23. Cui, Y.; Lauhon, L. J.; Gudiksen, M. S.; Wang, J. F.; Lieber, C. M. Diameter-Controlled Synthesis of Single-Crystal Silicon Nanowires Appl. Phys. Lett. 2001, 78, 2214-2216 (Pubitemid 33600539)
24. Fuhrmann, B.; Leipner, H. S.; Hoche, H. R.; Schubert, L.; Werner, P.; Gosele, U. Ordered Arrays of Silicon Nanowires Produced by Nanosphere Lithography and Molecular Beam Epitaxy Nano Lett. 2005, 5, 2524-2527
25. Glass, R.; Arnold, M.; Cavalcanti-Adam, E. A.; Blummel, J.; Haferkemper, C.; Dodd, C.; Spatz, J. P. Block Copolymer Micelle Nanolithography on Non-conductive Substrates New J. Phys. 2004, 6, 101
26. Glass, R.; Moller, M.; Spatz, J. P. Block Copolymer Micelle Nanolithography Nanotechnology 2003, 14, 1153-1160
27. Guczi, L.; Beck, A.; Horvath, A.; Horvath, D. From Molecular Clusters to Metal Nanoparticles Top. Catal. 2002, 19, 157-163
28. Sergeev, G. B. Nanochemistry; Elsevier B.V.: Amsterdam, 2006; Chapter 2.
29. Zhang, X. Y.; Whitney, A. V.; Zhao, J.; Hicks, E. M.; Van Duyne, R. P. Advances in Contemporary Nanosphere Lithographic Techniques J. Nanosci. Nanotechnol. 2006, 6, 1920-1934
30. Park, S.; Wang, J. Y.; Kim, B.; Xu, J.; Russell, T. P. A Simple Route to Highly Oriented and Ordered Nanoporous Block Copolymer Templates ACS Nano 2008, 2, 766-772
31. Ross, C. A.; Jung, Y. S.; Chuang, V. P.; Ilievski, F.; Yang, J. K. W.; Bita, I.; Thomas, E. L.; Smith, H. I.; Berggren, K. K.; Vancso, G. J.; Cheng, J. Y. Si-Containing Block Copolymers for Self-Assembled Nanolithography J. Vac. Sci. Technol., B 2008, 26, 2489-2494
32. Colli, A.; Hofmann, S.; Fasoli, A.; Ferrari, A. C.; Ducati, C.; Dunin-Borkowski, R. E.; Robertson, J. Synthesis and Otical Properties of Silicon Nanowires Grown by Different Methods Appl. Phys. A 2006, 85, 247-253
33. Suzuki, H.; Araki, H.; Tosa, M.; Noda, T. Formation of Silicon Nanowires by CVD Using Gold Catalysts at Low Temperatures Mater. Today 2007, 48, 2202-2206
34. Schmidt, O. G.; Eberl, K. Nanotechnology - Thin Solid Films Roll up into Nanotubes Nature 2001, 410, 168-168
35. Jeong, S. Y.; Kim, J. Y.; Yang, H. D.; Yoon, B. N.; Choi, S. H.; Kang, H. K.; Yang, C. W.; Lee, Y. H. Synthesis of Silicon Nanotubes on Porous Alumina Using Molecular Beam Epitaxy Adv. Mater. 2003, 15, 1172-1176
36. De Crescenzi, M.; Castrucci, P.; Scarselli, M.; Diociaiuti, M.; Chaudhari, P. S.; Balasubramanian, C.; Bhave, T. M.; Bhoraskar, S. V. Experimental Imaging of Silicon Nanotubes Appl. Phys. Lett. 2005, 86, 231901
37. Tang, Y. H.; Pei, L. Z.; Chen, Y. W.; Guo, C. Self-Assembled Silicon Nanotubes under Supercritically Hydrothermal Conditions Phys. Rev. Lett. 2005, 95, 116102
38. Chen, Y. W.; Tang, Y. H.; Pei, L. Z.; Guo, C. Self-Assembled Silicon Nanotubes Grown from Silicon Monoxide Adv. Mater. 2005, 17, 564-567
39. Sha, J.; Niu, J. J.; Ma, X. Y.; Xu, J.; Zhang, X. B.; Yang, Q.; Yang, D. Silicon Nanotubes Adv. Mater. 2002, 14, 1219-1221
40. Xie, M.; Wang, J. S.; Fan, Z. Y.; Lu, J. G.; Yap, Y. K. Growth of P-Type Si Nanotubes by Catalytic Plasma Treatments Nanotechnology 2008, 19, 365609
41. Yamada, S.; Fujiki, H. Experimental Evidence for Nanostructural Tube Formation of Silicon Atoms Jpn. J. Appl. Phys. 2006, 45, L837-L839
42. Kikkawa, J.; Ohno, Y.; Takeda, S. Growth Rate of Silicon Nanowires Appl. Phys. Lett. 2005, 86, 123109
43. Lee, C. J.; Park, J. Growth Model for Bamboolike Structured Carbon Nanotubes Synthesized Using Thermal Chemical Vapor Deposition J. Phys. Chem. B 2001, 105, 2365-2368
44. Kunadian, I.; Andrews, R.; Qian, D. L.; Menguc, M. P. Growth Kinetics of MWCNTs Synthesized by a Continuous-Feed CVD Method Carbon 2009, 47, 384-395
45. Govorov, A. O.; Richardson, H. H. Generating Heat with Metal Nanoparticles Nano Today 2007, 2, 30-38
46. Zeng, N.; Murphy, A. B. Heat Generation by Optically and Thermally Interacting Aggregates of Gold Nanoparticles under Illumination Nanotechnology 2009, 20, 375702
47. Rabinovich, Y. I.; Adler, J. J.; Ata, A.; Singh, R. K.; Moudgil, B. M. Adhesion between Nanoscale Rough Surfaces I. Role of Asperity Geometry J. Colloid Interface Sci. 2000, 232, 10-16
48. Rabinovich, Y. I.; Adler, J. J.; Ata, A.; Singh, R. K.; Moudgil, B. M. Adhesion between Nanoscale Rough Surfaces II. Measurement and Comparison with Theory J. Colloid Interface Sci. 2000, 232, 17-24
49. Tabor, D. Surface Forces and Surface Interactions J. Colloid Interface Sci. 1977, 58, 2-13
50. Song, I. K.; Yu, W. J.; Cho, Y. S.; Choi, G. S.; Kim, D. The Determining Factors for the Growth Mode of Carbon Nanotubes in the Chemical Vapour Deposition Process Nanotechnology 2004, 15, S590-S595
51. Perepichka, D. F.; Rosei, F. Silicon Nanotubes Small 2006, 2, 22-25
52. Lyubinetsky, I. V.; Adamchuk, V. K. Interface Formation During Silicon Deposition on Noble Metal Substrates: A Comparative AES Study Thin Solid Films 1996, 288, 182-185
53. Wagner, R. S.; Ellis, W. C. Vapor-Liquid-Solid Mechanism of Single Crystal Growth (New Method Growth Catalysis from Impurity Whisker Epitaxial + Large Crystals Si E) Appl. Phys. Lett. 1964, 4, 89
54. Wang, Y. W.; Schmidt, V.; Senz, S.; Gosele, U. Epitaxial Growth of Silicon Nanowires Using an Aluminium Catalyst Nat. Nanotechnol. 2006, 1, 186-189
55. Lu, W.; Lieber, C. M. Semiconductor Nanowires J. Phys. D Appl. Phys 2006, 39, R387-R406
56. Xie, T.; Schmidt, V.; Pippel, E.; Senz, S.; Gosele, U. Gold-Enhanced Low-Temperature Oxidation of Silicon Nanowires Small 2008, 4, 64-68