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Volumn 288, Issue 1-2, 1996, Pages 182-185
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Interface formation during silicon deposition on noble metal substrates: A comparative AES study
a,c b |
Author keywords
Auger electron spectroscopy; Interfaces; Metals; Silicon
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Indexed keywords
AUGER ELECTRON SPECTROSCOPY;
CHEMICAL BONDS;
DEPOSITION;
DIFFUSION IN SOLIDS;
FILM GROWTH;
GOLD;
INTERFACES (MATERIALS);
SEMICONDUCTING FILMS;
SILICON BONDS;
SEMICONDUCTING SILICON;
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EID: 0030290349
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(96)08858-X Document Type: Article |
Times cited : (10)
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References (25)
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