Infrared absorption in a-SiC:H alloy prepared by d.c. sputtering

Thin Solid Films

Volumn 426, Issue 1-2, 2003, Pages 117-123

  Saleh, R ^a   Munisa, L ^a   Beyer, W ^b  

^a UNIVERSITY OF INDONESIA   (Indonesia)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Amorphous materials; Hydrogen; Infrared spectroscopy; Sputtering

Indexed keywords

ABSORPTION SPECTROSCOPY; BACKSCATTERING; DEPOSITION; HYDROGEN; INFRARED SPECTROSCOPY; SILICON ALLOYS; SPUTTERING;

INFRARED ABSORPTION;

AMORPHOUS FILMS;

EID: 0037463265     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00003-8     Document Type: Article

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