Measurement of the refractive index and thickness of a transparent film from the shift of the interference pattern due to the sample rotation

Thin Solid Films

Volumn 518, Issue 14, 2010, Pages 3619-3624

  Santic B ^a  

^a RUDER BO KOVI INSTITUTE   (Croatia)

Author keywords

Optical characterization; Optical constants; Optical transmission; Refractive index; Thin films

Indexed keywords

GAN THIN FILMS; INTERFERENCE PATTERNS; LIGHT INCIDENCE ANGLES; OPTICAL CHARACTERIZATION; OPTICAL TRANSMISSION; OPTICAL TRANSMISSIONS; PRIOR INFORMATION; ROTATIONAL SHIFT; SAMPLE ROTATION; SIMULTANEOUS MEASUREMENT; THIN LAYERS; TRANSPARENT FILMS;

FILM THICKNESS; GALLIUM NITRIDE; LIGHT REFRACTION; LIGHT TRANSMISSION; OPTICAL CONSTANTS; REFRACTIVE INDEX; REFRACTOMETERS; THIN FILMS;

OPTICAL FILMS;

EID: 77950525813     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.09.067     Document Type: Article

References (30)

1. Born M., and Wolf E. Principles of Optics. 7th edition (1999), Cambridge University Press, Cambridge, England
2. Stenzel O. The Physics Thin Film Optical Spectra - An Introduction (2005), Springer
3. Macleod H.A. Thin-film Optical Filters. 3.edition (2001), Institute of Physics Publ
4. Singh S. Phys. Scr. 65 (2002) 167
5. Aspnes D.E. Thin Solid Films 455-456 (2004) 3
6. Urban F.K., and Barton D. Thin Solid Films 517 (2008) 1063
7. Johs B., and Herzinger C.M. Thin Solid Films 455-456 (2004) 66
8. Franta D., Ohlidal I., Frumar M., and Jedelsky J. Appl. Surf. Sci. 175-176 (2000) 555
9. Schubert M. Thin Solid Films 313-314 (1998) 323
10. Fukano T., and Yamaguchi I. Appl. Opt. 38 (1999) 4065
11. Galli M., Marabelli F., and Comoretto D. Appl. Phys. Lett. 86 (2005) 201119
12. Ulrich R., and Torge R. Appl. Opt. 12 (1973) 2901
13. Caliendo C., Verona E., and Saggio G. Thin Solid Films 292 (1997) 255
14. Schneider T., Leduc D., Lupi C., Cardin J., Gundel H., and Boisrobert C. J. Appl. Phys. 103 (2008) 063110
15. Ishikawa K., Yamano H., Kagawa K., Asada K., Iwata K., and Ueda M. Opt. Lasers Eng. 41 (2004) 19
16. Jung C., and Rhee B.K. Appl. Opt. 41 (2002) 3861
17. Warnecke A.J., and LoPresti P.J. IBM J. Res. Dev. 17 (1973) 256
18. Coppola G., Ferraro P., Iodice M., and De Nicola S. Appl. Opt. 42 (2003) 3882
19. Pliskin W.A., and Conrad E.E. IBM J. Res. Develop. 8 (1964) 43
20. Goldhahn R., Shokhovets S., Scheiner J., Gobsch G., Cheng T.S., Foxon C.T., Kaiser U., Kipshidze G.D., and Richter W. Phys. Status Solidi A 177 (2000) 107
21. Marti{dotless}nez-Anton J.C., and Bernabeu E. Thin Solid Films 313-314 (1998) 85
22. Šantić B., and Scholz F. Meas. Sci. Technol. 19 (2008) 105303
23. Swanepoel R. J. Phys. E: Sci. Instrum. 16 (1983) 1214
24. Swanepoel R. J. Phys. E: Sci. Instrum. 17 (1984) 896
25. Manifacier J.C., Gasiot J., and Fillard J.P. J. Phys. E 9 (1976) 1002
26. Lamminpää A., Nevas S., Manoocheri F., and Ikonen E. Appl. Opt. 45 (2006) 1392
27. Swanepoel R. J. Opt. Soc. Am. A 2 (1985) 1339
28. Zauner A.R.A., Devillers M.A.C., Hageman P.R., Larsen P.K., and Porowski S. MRS Internet J. Nitride Semicond. Res. 3 (1998) 17
29. Galiatsatos V. In: Mark J.E. (Ed). Physical Properties of Polymers Handbook (2007), Springer 838
30. Zhang X.M., Elkoun S., Ajji A., and Huneault M.A. Polymer 45 (2004) 217