Precision in ellipsometrically determined sample parameters: Simulation and experiment

Thin Solid Films

Volumn 455-456, Issue , 2004, Pages 66-71

  Johs, Blaine ^a   Herzinger, Craig M ^a  

^a J A WOOLLAM CO INC   (United States)

Author keywords

Ellipsometric precision; Noise; Variable angle spectroscopic elipsometry

Indexed keywords

COMPUTER SIMULATION; DATA REDUCTION; FOURIER TRANSFORMS; MONTE CARLO METHODS; SPURIOUS SIGNAL NOISE; THICK FILMS; THIN FILMS;

ELLIPSOMETRIC PRECISION; ROTATING COMPENSATOR ELLIPSOMETER (RCE); STANDARD DEVIATION; VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY;

ELLIPSOMETRY;

EID: 17144466908     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.11.205     Document Type: Conference Paper

References (22)

1. Snyder P.G., Rost M.C., Bu-Abbud G.H., Woollam J.A., Alterovitz S.A. J. Appl. Phys. 60:1986;3293.
2. Aspnes D.E. J. Opt. Soc. Am. 64:1974;639.
3. de Nijs J.M.M., van Silfhout A. J. Opt. Soc. Am. A. 5:1988;773.
4. Kleim R., Kuntzler L., El Ghemmaz A. J. Opt. Soc. Am. A. 11:1994;2550.
5. Humlicek J. J. Opt. Soc. Am. A. 2:1985;713.
6. Smit M.K., Verhoof J.W. Thin Solid Films. 189:1990;193.
7. Kim S.Y., Irene E.A. Rev. Sci. Instrum. 66:1995;5277.
8. Drevillon B., Perrin J., Marbot R., Violet A., Dalby J.L. Rev. Sci. Instrum. 53:1982;969.
9. Collins R.W. Rev. Sci. Instrum. 61:1990;2029.
10. Hauge P.S. Surf. Sci. 96:1980;108.
11. VASE™, J.A. Woollam Co., Inc., Lincoln, NE USA.
12. Collins R.W., An I., Fujiwara H., Lee J., Lu Y., Koh J., Rovira P.I. Thin Solid Films. 313-314:1998;18.
13. Opsal J., Fanton J., Chen J., Leng J., Wei L., Uhrich C., Senko M., Zaiser C., Aspnes D.E. Thin Solid Films. 313-314:1998;58.
14. Johs B., Hale J., Ianno N.J., Herzinger C.M., Tiwald T., Woollam J.A. Proc. SPIE. 4449:2001;41.
15. Jellison G.E. Jr. Thin Solid Films. 234:1993;416.
16. Macleod H.A. Thin-Film Optical Filters. 1989;40 McGraw-Hill, New York, NY.
17. Azzam R.M.A., Bashara N.M. Ellipsometry and Polarized Light. 1977;North-Holland, Amsterdam.
18. Auto-Retarder™ option, J.A. Woollam Co., Inc., Lincoln, NE, USA.
19. Herzinger C.M., Johs B., McGahan W.A., Paulson W. Thin Solid Films. 313-314:1998;281.
20. Model M2000V, J.A. Woollam Co., Inc., Lincoln, NE, USA.
21. Elman J.F., Greener J., Herzinger C.M., Johs B. Thin Solid Films. 313-314:1998;814.
22. McGahan W.A., Johs B., Woollam J.A. Thin Solid Films. 234:1993;443.