Optical characterization of chalcogenide thin films

Applied Surface Science

Volumn 175-176, Issue , 2001, Pages 555-561

  Franta, Daniel ^a   Ohlídal, Ivan ^a   Frumar, Miloslav ^b   Jedelský, Jaroslav ^b  

^a MASARYK UNIVERSITY   (Czech Republic)

^b UNIVERSITY OF PARDUBICE   (Czech Republic)

Author keywords

Chalcogenide films; Dispersion model; Ellipsometry; Reflectometry

Indexed keywords

ELLIPSOMETRY; EVAPORATION; FILM PREPARATION; GLASS; REFLECTOMETERS; SUBSTRATES; THIN FILMS;

CHALCOGENIDE THIN FILMS; NEAR NORMAL INCIDENCE SPECTROSCOPIC REFLECTOMETRY; VARIABLE ANGLE OF INCIDENCE SPECTROSCOPIC ELLIPSOMETRY;

AMORPHOUS FILMS;

EID: 0342995771     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00148-9     Document Type: Article

References (14)

1. Vlček M., Frumar M., Kubový M., Nevšímalová V. J. Non-Cryst. Sol. 137/138:1991;1035.
2. Lukeš F., Navrátil K., Cimpl Z., Kosek F. Phys. Stat. Sol. (A). 124:1991;K145.
3. Vlček M., Prokop J., Frumar M. Int. J. Electron. 77:1994;969.
4. Zakery A., Ewen P.J.S., Owen A.E. J. Non-Cryst. Sol. 198200:1996;769.
5. Márquez E., González-Leal J.M., Prieto-Alcón R., Vlček M., Stronski A., Wagner T., Minkov D. Appl. Phys. A. 67:1998;371.
6. Franta D., Ohlídal I., Munzar D. Acta Phys. Slov. 48:1998;451.
7. Franta D., Ohlídal I., Munzar D., Hora J., Navrátil K., Manfredotti C., Fizzotti F., Vittone E. Thin Solid Films. 343/344:1999;295.
8. Wood D.L., Tauc J. Phys. Rev. B. 5:1972;3144.
9. D. Franta, I. Ohlídal, Surf. Interface Anal. 30 (2000) 574.
10. Franta D., Ohlídal I. J. Mod. Opt. 45:1998;903.
11. I. Ohlídal, D. Franta, in: E. Wolf (Ed.), Progress in Optics XLI, North-Holland, Amsterdam, 2000, pp. 181-282.
12. I. Ohlídal, D. Franta, Acta Phys. Slov. 50 (2000) 489.
13. Forouhi A.R., Bloomer I. Phys. Rev. B. 34:1986;7018.
14. Jellison G.E. Jr., Modine F.A. Appl. Phys. Lett. 69:1996;371.