Method for measuring the refractive index and the thickness of transparent plates with a lateral-shear, wavelength-scanning interferometer

Applied Optics

Volumn 42, Issue 19, 2003, Pages 3882-3887

  Coppola, Giuseppe ^a   Ferraro, Pietro ^a   Iodice, Mario ^a   De Nicola, Sergio ^a  

^a CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

LIGHT SOURCES; PHASE SHIFT; REFRACTIVE INDEX; SEMICONDUCTOR LASERS; SIGNAL INTERFERENCE;

WAVELENGTH-SCANNING INTERFEROMETERS;

INTERFEROMETERS;

EID: 0042309613     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.42.003882     Document Type: Article

References (14)

1. T. Fukano and I. Yamaguchi, “Simultaneous measurement of thicknesses and refractive indices of multiple layers by a low-coherence confocal interference microscope,” Opt. Lett. 21, 1942-1944 (1996).
2. G. J. Tearney, M. E. Brezinski, J. F. Southern, B. E. Bouma, M. R. Hee, and J. G. Fujimoto, “Determination of the refractive index of highly scattering human tissue by optical coherence tomography,” Opt. Lett. 20, 2258-2260 (1995).
3. M. Haruna, M. Ohmi, T. Mitsuyama, H. Tajiri, H. Maruyama, and M. Hashimoto, “Simultaneous measurement of the phase and group indices and the thickness of transparent plates by low-coherence interferometry,” Opt. Lett. 23, 966-968 (1998).
4. H. Maruyama, S. Inoue, T. Mitsuyama, M. Ohmi, and M. Ha-runa, “Low-coherence interferometer system for the simultaneous measurement of refractive index and thickness,” Appl. Opt. 41, 1315-1322 (2002).
5. T. Fukano and I. Yamaguchi, “Separation of measurement of the refractive index and the geometrical thickness by use of a wavelength-scanning interferometer with a confocal microscope,” Appl. Opt. 38, 4065-4073 (1999).
6. D. Bhattacharyya, A. Ray, B. K. Dutta, and P. N. Ghosh, “Direct measurement on transparent plates by using Fizeau interferometry,” Opt. Laser Technol. 34, 93-96 (2002).
7. J. C. Martinez-Anton and E. Bernabeu, “Simultaneous determination of film thickness and refractive index by interferential spectrogoniometry,” Opt. Commun. 132, 321-328 (1996).
8. J. C. Wyant, “A simple interferometric OTF instrument,” Opt. Commun. 19, 120-122 (1976).
9. D. Malacara, ed. Optical Shop Testing (Wiley, New York, 1990).
10. S. De Nicola, P. Ferraro, A. Finizio, P. De Natale, S. Grilli, and G. Pierattini, “A Mach-Zehender interferometric system for measuring the refractive indices of uniaxial crystals,” Opt. Commun. 202, 9-15 (2002).
11. M. Musso, R. Aschauer, A. Asenbaum, C. Vasi, and E. Milhelm, “Interferometric determination of refractive index of liquid sulphur dioxide,” Meas. Sci. Technol. 11, 1714-1720 (2000).
12. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977), p. 356.
13. We have adopted the Curve Fitting Toolbox of Matlab 6.5 (Release 13).
14. T. Kreis, in Holographic Interferometry, P. K. Rastogi, ed. (Springer-Verlag, Berlin, 1994), p. 200.