Measurement of thickness of a thin film by means of laser interference at many incident angles

Optics and Lasers in Engineering

Volumn 41, Issue 1, 2004, Pages 19-29

  Ishikawa, Kazuhiko ^a   Yamano, Hitomi ^a   Kagawa, Ki Ichiro ^a   Asada, Katsuhiko ^a   Iwata, Koichi ^b   Ueda, Masahiro ^a  

^a UNIVERSITY OF FUKUI   (Japan)

^b Osaka Prefecture University   (Japan)

Author keywords

Film thinckness; Laser interference; Refractive index

Indexed keywords

LIGHT INTERFERENCE; REFRACTIVE INDEX; THIN FILMS; TRANSPARENCY;

INCIDENT ANGLES;

LASER OPTICS;

EID: 0141650550     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0143-8166(02)00146-X     Document Type: Article

References (6)

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3. Jung R.C., Rhee K.B. Appl Opt. 41(19):2002;3861-3865.
4. Kondou M. Patent 2001-153619 (in Japan).
5. Haruna M. Patent 2001-141652(in Japan).
6. Tsuruta T, In: Applied optics I and II, vols. 33(I) and 114(II). Tokyo: Baifukan, 1998 (in Japanese).