Expanding horizons: New developments in ellipsometry and polarimetry

Thin Solid Films

Volumn 455-456, Issue , 2004, Pages 3-13

  Aspnes, D E ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

Ellipsometry; Mueller matrix; Polarimetry

Indexed keywords

ANISOTROPY; DATA ACQUISITION; DIELECTRIC MATERIALS; MINICOMPUTERS; POLARIMETERS; POLYMERS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR MATERIALS; SPECTROSCOPIC ANALYSIS; ULTRAVIOLET RADIATION;

MUELLER-MATRIX; SCATTEROMETRY; SYSTEM TRANSFER FUNCTION (STF); WIDE-BANDGAP MATERIALS;

ELLIPSOMETRY;

EID: 17144454104     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.12.038     Document Type: Conference Paper

References (41)

1. Drude P. Ann. Physik Chemie. 32:1887;584.
2. Drude P. Ann. Physik Chemie. 38:1890;481.
3. Rothen A. Passaglia E., Stromberg R.R., Kruger J. Ellipsometry in the Measurement of Surfaces and Thin Films. 256:1964;7 Natl. Bur. Std. Misc. Publ.
4. Hall A.C. Surf. Sci. 16:1969;1.
5. Vedam K. Thin Solid Films. 313-314:1998;1.
6. Hauge P.S., Dill F.H. IBM J. Res. Dev. 17:1973;472.
7. Aspnes D.E. Opt. Commun. 8:1973;222.
8. Download available at http:/www.sia-online.org/downloads/ACF2DE.pdf.
9. Tronstad L. Trans. Faraday Soc. 29:1933;502.
10. Rothen A. Rev. Sci. Instrum. 16:1945;26.
11. Faucher J.A., McManus G.M., Turnit H.J. J. Opt. Soc. Am. 48:1958;51.
12. Passaglia E., Stromberg R.R., Kruger J. Ellipsometry in the Measurement of Surfaces and Thin Films. 256:1964;Natl. Bur. Std. Misc. Publ.
13. Kent C.V., Lawson J. J. Opt. Soc. Am. 27:1937;117.
14. Budde W. Appl. Opt. 1:1962;201.
15. Cahan B.D., Spanier R.F. Surf. Sci. 16:1969;166.
16. Hauge P.S., Dill F.H. Opt. Commun. 14:1975;431.
17. Hauge P.S. Surf. Sci. 56:1976;148.
18. Collins R.W., Koh J. J. Opt. Soc. Am. A16:1999;1997.
19. C. Chen, I. An, G.M. Ferriera, N.J. Podraza, J.A. Zapien, R.W. Collins (these Proceedings).
20. Serkowski K. Gehrels T. Planets, Stars, and Nebulae studied with photopolarimetry. 1974;135 University of Arizona Press, Tucson.
21. Opsal J., Fanton J., Chen J., Leng J., Wei L., Uhrich C., Senko M., Zaiser C., Aspnes D.E. Thin Solid Films. 313-314:1998;58.
22. Thompson R.C., Bottinger J.R., Fry E.S. Appl. Opt. 19:1980;1323.
23. Drevillon B. Prog. Cryst. Growth. 27:1993;1.
24. Jellison G.E. Jr, Modine F.A. Appl. Opt. 36:1997;8184.
25. Benferhat R. Vide. 47:1991;264.
26. Data obtained from the Web of Science http://isi6.isiknowledge.com/ portal.cgi/wos.
27. Born M., Wolf E. Principles of Optics. 5th ed :1975;Pergamon, Oxford.
28. Azzam R.M.A., Bashara N.M. Ellipsometry and Polarized Light. 1977;North-Holland, Amsterdam.
29. T. Mori, D.E. Aspnes (these Proceedings).
30. D.E. Aspnes J. Opt. Soc. Am. A21 (2004) 403.
31. Barakat R. Opt. Commun. 38:1981;159.
32. Jellison G.E. Jr. Thin Solid Films. 313-314:1998;33.
33. J. Opsal (private communication).
34. K. Flock (these Proceedings).
35. Schubert M. Phys. Rev. 53:1996;4265.
36. Chen C., An I., Collins R.W. Phys. Rev. Lett. 90:2003;217402.
37. Schubert M., Hoffmann T., Herzinger C.M. J. Opt. Soc. Am. A. 20:2003;347.
38. Wagner T., Hilfiker J.N., Tiwald T.E., Bungay C.L., Zollner S. Phys. Status Solidi. A188:2001;1553.
39. Opsal J., Chu H., Wen Y., Chang Y.C., Li G. Proc. SPIE. 4689:2002;163.
40. E. Terry (these Proceedings).
41. Leng J.M., Opsal J., Aspnes D.E. J. Vac. Sci. Technol. A17:1999;380.