Numerical ellipsometry: Ellipsometer analysis in the n-k plane for select combinations of metals, semiconductors, and insulators

Thin Solid Films

Volumn 517, Issue 3, 2008, Pages 1063-1071

  Urban III, F K ^a   Barton, D ^a  

^a FLORIDA INTERNATIONAL UNIVERSITY   (United States)

Author keywords

Ellipsometry; Growing films; Optical measurements; Thin films

Indexed keywords

CURVE FITTING; ELECTRIC CONDUCTIVITY; ELLIPSOMETRY; FILM GROWTH; LEAST SQUARES APPROXIMATIONS; LIGHT REFLECTION; METAL ANALYSIS; OPTICAL DATA PROCESSING; SEMICONDUCTOR MATERIALS; STEREOCHEMISTRY; SURFACE CHEMISTRY; THICK FILMS; TREES (MATHEMATICS);

ADVANCED TREATMENTS; ALGORITHM PERFORMANCES; ANALYTICAL METHODS; BK7 GLASSES; COMPLEX ANALYSES; ELLIPSOMETER; GROWING FILMS; INSULATOR MATERIALS; INSULATOR SUBSTRATES; LEAST SQUARES METHODS; MATERIAL COMBINATIONS; MEASURED DATUMS; METAL FILMS; MULTIPLE SOLUTIONS; OPTICAL MEASUREMENTS; OPTICAL-; PHYSICAL PARAMETERS; POLARIZATION STATES; POLARIZED LIGHTS; REFLECTING SURFACES; SEMI-CONDUCTORS; SOLUTION ALGORITHMS;

OPTICAL FILMS;

EID: 56649089770     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2008.05.041     Document Type: Article

References (6)

1. Azzam R.M.A., and Bashara N.M. Ellipsometry and Polarized Light (1977), North Holland, New York
2. F.L. McCrakin and J.P. Colson, A Fortran program for analysis of ellipsometer measurements and calculation of reflection, Dept. of Commerce, National Bureau of Standards: USGPO (1964).
3. Urban III F.K., and Comfort J.C. Numerical ellipsometry: enhancement of new algorithms for real-time, in situ film growth monitoring. Thin Solid Films 253 (1994) 262
4. Barton D., Comfort J.C., and Urban III F.K. Numerical ellipsometry: real-time solutions using mapping onto the complex index plane. J. Vac. Sci. Tech. A 14 3 (1996) 786
5. Conway J.B. Functions of One Complex Variable II (1995), Springer-Verlag
6. Barton D., and Urban III F.K. Ellipsometer analysis in the n-k plane. Thin Solid Films 516 2-4 (2007) 119