Fused silica 'glass grass': Fabrication and utilization

Journal of Micromechanics and Microengineering

Volumn 20, Issue 2, 2010, Pages

  Lilienthal, Katharina ^a   Stubenrauch, Mike ^a   Fischer, Michael ^a   Schober, Andreas ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BONDING TECHNOLOGY; COMPREHENSIVE STUDIES; DEEP REACTIVE ION ETCHING; ENERGY DISPERSIVE X-RAY; ETCHING CONDITION; HYBRID MATERIAL SYSTEMS; INDUCTIVE COUPLED PLASMA; PLASMA DRY ETCHING; SELF-ORGANIZED NANOSTRUCTURES;

ADHESION; CELL ADHESION; COMPUTER CRIME; DRY ETCHING; ELECTRON BEAM LITHOGRAPHY; GLASS; HYBRID MATERIALS; INDUCTIVELY COUPLED PLASMA; MATERIALS PROPERTIES; MORPHOLOGY; NANOSTRUCTURES; OXIDES; PLASMA ETCHING; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SILICA; SURFACE MORPHOLOGY;

FUSED SILICA;

EID: 77950235424     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/2/025017     Document Type: Article

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