Silicon Nanopillars Formed by Reactive Ion Etching Using a Self-Organized Gold Mask

Physica Scripta T

Volumn 79, Issue , 1999, Pages 263-265

  Ovchinnikov, V ^a   Malinin, A ^a   Novikov, S ^a   Tuovinen, C ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343301413     PISSN: 02811847     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (4)

1. Nassiopoulos, A. G., Grigoropoulos, S. and Papadimitriou, D., Appl. Phys. Lett. 69, 2267 (1996).
2. Kraft, R. and Prengle, S., Solid State Technol. 8, 57 (1995).
3. Malinin, A., Majamaa, T. and Hovinen, A., Presented at the 2nd International Conference on Low Dimensional Structures & Devices, Lisbon, Portugal, (1997).
4. Ahopelto, J., Airaksinen, V.-M., Siren, E. and Niemi, H. E.-M., J. Vac. Technol. B 13, 161 (1995).