Fabrication of silica nanotube arrays from vertical silicon nanowire templates

Journal of the American Chemical Society

Volumn 125, Issue 18, 2003, Pages 5254-5255

  Fan, Rong ^a   Wu, Yiying ^a   Li, Deyu ^b   Yue, Min ^b   Majumdar, Arun ^b   Yang, Peidong ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NANOPARTICLE; NANOTUBE; NANOWIRE; OXYGEN; SILICON DIOXIDE; XENON;

ARTICLE; HIGH TEMPERATURE; HYDROPHILICITY; OXIDATION; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; VAPOR;

EID: 0038631953     PISSN: 00027863     EISSN: None     Source Type: Journal    
DOI: 10.1021/ja034163+     Document Type: Article

References (10)

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10. 2 = 4:5) to conduct etching for 30 s at a total pressure of 9 Torr. The chamber is then evacuated and flushed with nitrogen, and the etching is carried out for a second cycle. Eight cycles were carried out for complete etching of the silicon cores.