Formation of nanoporous glass layer

Physica Scripta T

Volumn T114, Issue , 2004, Pages 66-68

  Grigoras, Kestutis ^a   Franssila, Sami ^a  

^a AALTO UNIVERSITY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CHROMATOGRAPHIC ANALYSIS; PLASMA ETCHING; REACTIVE ION ETCHING;

CHROMATOGRAPHIC SEPARATIONS; NANOPOROUS GLASS LAYER; POROUS LAYERS;

SEMICONDUCTING GLASS;

EID: 39549112683     PISSN: 02811847     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1088/0031-8949/2004/T114/015     Document Type: Conference Paper

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