Micro fluidic channel machining on fused silica glass using powder blasting

Sensors

Volumn 8, Issue 2, 2008, Pages 700-710

  Jang, Ho Su ^a   Cho, Myeong Woo ^b   Park, Dong Sam ^a  

^a SolarLight Ltd   (South Korea)

^b Inha University   (South Korea)

Author keywords

Bio sensor; Fuel cell; Fused silica glass; Lab on a chip; Micro fluidic channel; Micro powder blasting

Indexed keywords

ABRASIVES; AMORPHOUS SILICON; BLASTING; COMPRESSED AIR; FLUIDIC DEVICES; FUEL CELLS; GLASS; LAB-ON-A-CHIP; NOZZLES; PARTICLE SIZE; SILICA; SURFACE ROUGHNESS; THERMAL EXPANSION;

ABRASIVE PARTICLE SIZE; INJECTION PRESSURES; LOW THERMAL EXPANSION; MACHINING CHARACTERISTICS; MICRO FLUID CHANNELS; MICROFLUIDIC CHANNEL; MICROPOWDERS; STAND-OFF DISTANCE (SOD);

FUSED SILICA;

EID: 40849111976     PISSN: 14243210     EISSN: 14248220     Source Type: Journal    
DOI: 10.3390/s8020700     Document Type: Article

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