Black silicon - New functionalities in microsystems

Journal of Micromechanics and Microengineering

Volumn 16, Issue 6, 2006, Pages

  Stubenrauch, M ^a   Fischer, M ^a   Kremin, C ^a   Stoebenau, S ^a   Albrecht, A ^a   Nagel, O ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFACES (MATERIALS); MICROFLUIDICS; MICROSYSTEMS; REACTIVE ION ETCHING; SILICON WAFERS; SURFACE STRUCTURE;

BONDING INTERFACE; ROOM TEMPERATURE; VELCRO-LIKE ASSEMBLY;

SILICON;

EID: 34247580364     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/6/S03     Document Type: Article

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