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Journal of Physics D: Applied Physics

Volumn 43, Issue 12, 2010, Pages

Time resolved studies on pulsed fluorocarbon plasmas using chirped quantum cascade lasers

(4) Welzel, S a Stepanov, S b Meichsner, J b Ropcke J a

a LEIBNIZ INSTITUTE FOR PLASMA SCIENCE AND TECHNOLOGY (Germany)

b UNIVERSITY OF GREIFSWALD (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SIGNALS; DETECTION LIMITS; EFFECTIVE ABSORPTION; FLUOROCARBON PLASMA; GAS EXCHANGE; HIGH RESOLUTION; IN-SITU; LOW-PRESSURE CONDITIONS; MULTI-SPECIES; QUANTUM CASCADES; RADIO FREQUENCY DISCHARGES; RAPID TEMPERATURE; RELATIVE TEMPERATURES; SPECTRAL POSITION; SPECTROSCOPIC DATA; STABLE SPECIES; TIME RESOLUTION; TIME RESOLVED STUDIES; TIME-RESOLVED;

ELECTRIC DISCHARGES; GAS ABSORPTION; PULSED LASERS; QUANTUM CASCADE LASERS;

ABSORPTION SPECTROSCOPY;

EID: 77949530949 PISSN: 00223727 EISSN: 13616463 Source Type: Journal
DOI: 10.1088/0022-3727/43/12/124014 Document Type: Article

Times cited : (6)

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