Application of a quantum cascade laser for time-resolved, in situ probing of CH4/H2 and C2H2/H2 gas mixtures during microwave plasma enhanced chemical vapor deposition of diamond

Journal of Physical Chemistry A

Volumn 110, Issue 8, 2006, Pages 2821-2828

  Cheesman, A ^a   Smith, J A ^a   Ashfold, M N R ^a   Langford, N ^b   Wright, S ^b   Duxbury, G ^b  

^a UNIVERSITY OF BRISTOL   (United Kingdom)

^b UNIVERSITY OF STRATHCLYDE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; CHEMICAL VAPOR DEPOSITION; DIAMONDS; LASERS; MICROWAVES; PLASMAS; THERMODYNAMIC PROPERTIES;

GAS-PHASE CHEMISTRY; MICROWAVE PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SINGLE PASS ABSORPTION METHODS; THERMODYNAMIC EQUILIBRIUM;

QUANTUM THEORY;

EID: 33644915041     PISSN: 10895639     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp056622u     Document Type: Article

References (31)

1. Celii, F. G.; Butler, J. E. Annu. Rev. Phys. Chem. 1991, 42, 643.
2. Goodwin, D. G.; Butler, J. E. In Handbook of Industrial Diamonds and Diamond Films; Prelas, M. A., Popovici, G., Bigelow, L. G., Eds.; Marcel Dekker: New York, 1998; pp 527-81 and references therein.
3. Ashfold, M. N. R.; May, P. W.; Petherbridge, J. R.; Rosser, K. N.; Smith, J. A.; Mankelevich, Y. A.; Suetin, N. V. Phys. Chem. Chem. Phys. 2001, 3, 3471 and references therein.
4. Hsu, W. L.; McMaster, M. C.; Coltrin, M. E.; Dandy, D. S. Jpn. J. Appl. Phys. 1994, 33, 2231.
5. Rego, C. A.; May, P. W.; Henderson, C. R.; Ashfold, M. N. R.; Rosser, K. N.; Everitt, N. M. Diamonds Relat. Mater. 1995, 4, 770.
6. Celii, F. G.; Pehrsson, P. E.; Wang, H.-t.; Butler, J. E. Appl. Phys. Lett. 1988, 52, 2043.
7. Luque, J.; Juchmann, W.; Jeffries, LE. J. Appl. Phys. 1997, 82, 2072.
8. Wahl, E. H.; Owano, T. G.; Kruger, C. H.; Zalicki, P.; Ma, Y.; Zare, R. N. Diamonds Relat. Mater. 1996, 5, 373.
9. Cappelli, M. A.; Owano, T. G.; Gicquel, A.; Duten, X. Plasma Chem. Plasma Proc. 2000, 20, 1.
10. See, for example: Wills, J. B.; Smith, J. A.; Boxford, W. E.; Elks, J. M. F.; Ashfold, M. N. R.; Orr-Ewing, A. J. J. Appl. Phys. 2002 92, 4213.
11. John, P.; Rabeau, J.; Wilson, J. I. B. Diamonds Relat. Mater. 2002, 11, 608.
12. Meier, U.; Kohse-Hoinghaus, K.; Schafer, L.; Klages, C.-P. Appl. Opt. 1990, 29, 4993.
13. Gicquel, A.; Chenevier, M.; Breton, Y.; Petiau, M.; Booth, J. P.; Hassouni, K. J. Phys. III 1996, 6, 1167.
14. Redman, S. A.; Chung, C.; Rosser, K. N.; Ashfold, M. N. R. Phys. Chem. Chem. Phys. 1999, 1, 1415.
15. Smith, J. A.; Cameron, E.; Ashfold, M. N. R.; Yu. Mankelevich, A.; Suetin, N. V. Diamonds. Relat. Mater. 2001, 10, 358.
16. Mankelevich, Yu. A.; Suetin, N. V.; Ashfold, M. N. R.; Smith, J. A.; Cameron, E. Diamonds Relat. Mater. 2001, 10, 364.
17. Rennick, C. J.; Smith, A. G.; Smith, J. A.; Wills, J. B.; Orr-Ewing, A. J.; Ashfold, M. N. R.; Mankelevich, Yu. A.; Suetin, N. V. Diamonds Relat. Mater. 2004, 73, 561.
18. Bachmann, P. K.; Leers, D.; Lydtin, H. Diamonds Relat. Mater. 1991, 1, 1 and references therein.
19. Kazarinov, R. F.; Suris, R. A. Sov. Phys. Semicond. 1971, 5, 707.
20. Faist, J.; Capasso, F.; Sivco, D. L.; Sirtori, C.; Hutchinson, A. L.; Cho, A. Y. Science 1994, 264, 553.
21. Duxbury, G.; Langford, N.; McCulloch, M. T.; Wright, S. Chem. Soc. Rev. 2005, 34, 1.
22. McCulloch, M. T.; Normand, E. L.; Langford, N.; Duxbury, G.; Newnham, D. A. J. Opt. Soc. Am. A 2003, 20, 1761.
23. McCulloch, M. T.; Langford, N.; Duxbury, G. Appl. Opt. 2005, 44, 2887.
24. Cascade Tecchnolgies Ltd., 141 St James Road, Glasgow G4 0LT.
25. Kabbadi, Y.; Herman, M.; di Lonardo, G.; Fusina, L.; Johns, J. W. C. J. Mol. Spectrosc. 1991, 150, 535.
26. HITRAN 2000. Rothman, L. S.; Barbe, A.; Benner, D. C.; Brown, L. R.; Camy-Peyret, C.; Carleer, M. R.; Chance, K.; Clerbaux, C.; Dana, V.; Devi, V. M.; Fayt, A.; Flaud, J.-M.; Gamache, R. R.; Goldman, A.; Jacquemart, D.; Jucks, K. W.; Lafferty, W. J.; Mandin, J.-Y.; Massie, S. T.; Nemtchinov, V.; Newnham, D. A.; Perrin, A.; Rinsland, C. P.; Schroeder, J.; Smith, K. M.; Smith, M. A. H.; Tang, K.; Toth, R. A.; Vander Auwera, J.; Varanasi, P.; Yoshino, K. J. Quant, Spectrosc. Radiat. Transfer 2003, 82, 5.
27. McCulloch, M. T.; Wright, S.; Langford, N.; Duxbury, G. Unpublished results.
28. Cheesman, A.; Smith, J. A.; Ma, J.; Henney, J. J.; Coulson, B. R.; Ashfold, M. N. R. Unpublished results.
29. Rennick, C. J.; Engeln, R.; Smith, J. A.; Orr-Ewing, A. J.; Ashfold, M. N. R.; Mankelevich, Yu. A. J. Appl. Phys. 2005, 97, 113306.
30. Baulch, D. L.; Cobos, C. J.; Cox, R. A.; Esser, C.; Frank, P.; Just, Th.; Kerr, J. A.; Pilling, M. J.; Troe, J.; Walker, R. W.; Warnatz, J. J. Phys. Chem. Ref. Data 1992, 21, 411 and references therein.
31. http://webbook.nist.gov/chemistry/.