Diagnostic system for plasma/surface energy transfer characterization

Review of Scientific Instruments

Volumn 77, Issue 3, 2006, Pages

  Thomann, A L ^a   Semmar, N ^a   Dussart, R ^a   Mathias, J ^a   Lang, V ^b  

^a CNRS   (France)

^b UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONS; INTERFACIAL ENERGY; PHOTONS; PLASMA ETCHING; PLASMAS; SPUTTER DEPOSITION; THIN FILMS;

BLACKBODY (BB); CALIBRATION SPECIFICATIONS; LANGMUIR PROBE CHARACTERIZATION; LOW-PRESSURE PLASMA CONDITIONS;

ENERGY TRANSFER;

EID: 33645837259     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2166467     Document Type: Article

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