Measurements of heat flux distribution toward substrate by means of the LiNbO3 interferometer, and electron density in a capacitively coupled rf discharge plasma

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 206, Issue , 2003, Pages 777-781

  Mukaigawa, S ^a   Kanno, S ^a   Takaki, K ^a   Fujiwara, T ^a  

^a IWATE UNIVERSITY   (Japan)

Author keywords

Electron density; Heat flux; Ion flux; Laser interferometry; LiNbO3; RF discharge

Indexed keywords

ARGON; BIREFRINGENCE; CAPACITORS; CARRIER CONCENTRATION; DIFFUSION; ELECTRODES; HEAT FLUX; INTERFEROMETERS; LITHIUM NIOBATE; PLASMA DENSITY; SUBSTRATES;

CAPACITIVELY COUPLED PLASMA (CCP);

ION BEAMS;

EID: 0038413467     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00847-4     Document Type: Conference Paper

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