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Thin Solid Films

Volumn 377-378, Issue , 2000, Pages 585-591

Investigations on the energy influx at plasma processes by means of a simple thermal probe

(5) Kersten, H a Rohde, D a Berndt, J b Deutsch, H a Hippler, R a

a UNIVERSITY OF GREIFSWALD (Germany)

b RUHR UNIVERSITY BOCHUM (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON CYCLOTRON RESONANCE; MAGNETRON SPUTTERING; METALLIC FILMS; MOLYBDENUM; PLASMA APPLICATIONS; SPUTTER DEPOSITION; SUBSTRATES; TEMPERATURE MEASUREMENT;

ENERGY FLUX; THERMAL DIAGNOSTICS;

AMORPHOUS FILMS;

EID: 19244376574 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(00)01442-5 Document Type: Article

Times cited : (61)

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