Measurement of energy flux at the substrate in a magnetron sputter system using an integrated sensor

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 4, 2004, Pages 1420-1424

  Ekpe, Samuel D ^a   Dew, Steven K ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ENERGY FLUX; INTEGRATED SENSORS; SPUTTER DEPOSITION SYSTEMS;

CALORIMETERS; CMOS INTEGRATED CIRCUITS; FLUXES; HEAT RESISTANCE; PLASMA DEVICES; POLYSILICON; SENSORS; SPECIFIC HEAT; SPUTTER DEPOSITION; THERMISTORS; THERMOCOUPLES; THIN FILMS;

MAGNETRON SPUTTERING;

EID: 4344657125     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1705640     Document Type: Conference Paper

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