-
1
-
-
0035876435
-
A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout
-
DOI 10.1016/S0925-4005(01)00683-9, PII S0925400501006839
-
F.M. Battiston J.P. Ramseyer H.P. Lang M.K. Baller C. Gerber J.K. Gimzewski E. Meyer H.J. Güntherodt 2001 A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending read-out Sensors Actuators B 77 122 131 10.1016/S0925-4005(01)00683-9 (Pubitemid 32546774)
-
(2001)
Sensors and Actuators, B: Chemical
, vol.77
, Issue.1-2
, pp. 122-131
-
-
Battiston, F.M.1
Ramseyer, J.-P.2
Lang, H.P.3
Baller, M.K.4
Gerber, C.5
Gimzewski, J.K.6
Meyer, E.7
Guntherodt, H.-J.8
-
2
-
-
0032594981
-
Speed-energy optimization of electrostatic actuators based on pull-in
-
L. Castaóer S.D. Senturia 1999 Speed-energy optimization of electrostatic actuators based on pull-in Micromech. Microeng. 8 290 298
-
(1999)
Micromech. Microeng.
, vol.8
, pp. 290-298
-
-
Castaóer, L.1
Senturia, S.D.2
-
3
-
-
0030103275
-
Dynamics of polysilicon parallel-plate electrostatic actuators
-
10.1016/0924-4247(96)80152-X
-
P.B. Chu P.R. Nelson M.L. Tachiki K.S. Pister 1996 Dynamics of polysilicon parallel-plate electrostatic actuators Sensors Actuators A 52 216 220 10.1016/0924-4247(96)80152-X
-
(1996)
Sensors Actuators A
, vol.52
, pp. 216-220
-
-
Chu, P.B.1
Nelson, P.R.2
Tachiki, M.L.3
Pister, K.S.4
-
4
-
-
24944586680
-
Microfabrication of sensors with magnetic resonating elements for further application in molecular probe chemistry
-
DOI 10.1016/j.sna.2005.03.059, PII S0924424705001810
-
L. Grigore G. Ensell A. Evans 2005 Microfabrication of sensors with magnetic resonating elements for further application in molecular probe chemistry Sensors Actuators 123 285 289 10.1016/j.sna.2005.03.059 (Pubitemid 41315862)
-
(2005)
Sensors and Actuators, A: Physical
, vol.123-124
, pp. 285-289
-
-
Grigore, L.1
Ensell, G.2
Evans, A.3
-
7
-
-
31944450118
-
Capacitive resonant mass sensor with frequency demodulation detection based on resonant circuit
-
S. Kim T. Ono M. Esashi 2006 Capacitive resonant mass sensor with frequency demodulation detection based on resonant circuit Appl. Phys. Lett. 88 53 116
-
(2006)
Appl. Phys. Lett.
, vol.88
, pp. 53-116
-
-
Kim, S.1
Ono, T.2
Esashi, M.3
-
8
-
-
4444272849
-
Pull-in dynamics of an elastic beam actuated by continuously distributed electrostatic force
-
10.1115/1.1760559
-
S. Krylov R. Maimon 2004 Pull-in dynamics of an elastic beam actuated by continuously distributed electrostatic force ASME J. Vib. Acoust. 126 332 342 10.1115/1.1760559
-
(2004)
ASME J. Vib. Acoust.
, vol.126
, pp. 332-342
-
-
Krylov, S.1
Maimon, R.2
-
9
-
-
33846062124
-
CMOS micromachined capacitive cantilevers for mass sensing
-
DOI 10.1088/0960-1317/16/12/019, PII S0960131706278082, 019
-
Y.C. Li M. Ho S. Hung M. Chen M.S.C. Lu 2006 CMOS micromachined capacitive cantilevers for mass sensing Micromech. Microeng. 16 2659 2665 10.1088/0960-1317/16/12/019 (Pubitemid 46069535)
-
(2006)
Journal of Micromechanics and Microengineering
, vol.16
, Issue.12
, pp. 2659-2665
-
-
Li, Y.-C.1
Ho, M.-H.2
Hung, S.-J.3
Chen, M.-H.4
Lu, M.S.-C.5
-
10
-
-
41549090941
-
Modeling, design, and characterization of multisegment cantilevers for resonant mass detection
-
Lobontiu, N., Lupea, I., Ilic, R., Craighead, H.G.: Modeling, design, and characterization of multisegment cantilevers for resonant mass detection. Appl. Phys. 103 (2008)
-
(2008)
Appl. Phys.
, vol.103
-
-
Lobontiu, N.1
Lupea, I.2
Ilic, R.3
Craighead, H.G.4
-
11
-
-
35148855278
-
Modelling the electrostatic actuation of MEMS: State of the art 2005
-
Marquès, A.F., Castelló, R.C., Shkel, A.M.: Modelling the electrostatic actuation of MEMS: State of the art 2005. Technical Report IOC-DT 18:1-24 (2005)
-
(2005)
Technical Report IOC-DT
, vol.18
, pp. 1-24
-
-
Marquès, A.F.1
-
12
-
-
33847213227
-
Investigation of the sorption properties of thin Ge-S-AgI films deposited on cantilever-based gas sensor
-
DOI 10.1007/s00339-007-3864-5
-
B. Monchev D. Filenko N. Nikolov C. Popov T. Ivanov P. Petkov I.W. Rangelow 2007 Investigation of the sorption properties of thin Ge-S-AgI films deposited on cantilever-based gas sensor Appl. Phys. A 87 31 36 10.1007/s00339-007-3864-5 (Pubitemid 46309283)
-
(2007)
Applied Physics A: Materials Science and Processing
, vol.87
, Issue.1
, pp. 31-36
-
-
Monchev, B.1
Filenko, D.2
Nikolov, N.3
Popov, C.4
Ivanov, T.5
Petkov, P.6
Rangelow, I.W.7
-
15
-
-
33846559280
-
Dynamic pull-in phenomenon in MEMS resonators
-
DOI 10.1007/s11071-006-9079-z
-
A.H. Nayfeh M.I. Younis E.M. Abdel-Rahman 2007 Dynamic pull-in phenomenon in MEMS resonators Nonlinear Dyn. 48 153 163 1177.74191 10.1007/s11071-006- 9079-z (Pubitemid 46154558)
-
(2007)
Nonlinear Dynamics
, vol.48
, Issue.1-2
, pp. 153-163
-
-
Nayfeh, A.H.1
Younis, M.I.2
Abdel-Rahman, E.M.3
-
16
-
-
34248578217
-
Piezoelectric-excited millimeter-sized cantilever sensors detect density differences of a few micrograms/mL in liquid medium
-
DOI 10.1016/j.snb.2006.12.043, PII S0925400506008483
-
K. Rijal R. Mutharasan 2007 Piezoelectric-excited millimeter-sized cantilever sensors detect density differences of a few micrograms/mL in liquid medium Sensors Actuators B: Chemical 124 237 244 10.1016/j.snb.2006.12.043 (Pubitemid 46754836)
-
(2007)
Sensors and Actuators, B: Chemical
, vol.124
, Issue.1
, pp. 237-244
-
-
Rijal, K.1
Mutharasan, R.2
-
17
-
-
33745745445
-
A femtogram resolution mass sensor platform, based on SOI electrostatically driven resonant cantilever. Part II: Sensor calibration and glycerine evaporation rate measurement
-
10.1016/j.ultramic.2005.12.017
-
J. Teva G. Abadal F. Torres J. Verd F. Perez-Murano N. Barniol 2006 A femtogram resolution mass sensor platform, based on SOI electrostatically driven resonant cantilever. Part II: Sensor calibration and glycerine evaporation rate measurement Ultramicroscopy 106 808 814 10.1016/j.ultramic.2005.12.017
-
(2006)
Ultramicroscopy
, vol.106
, pp. 808-814
-
-
Teva, J.1
Abadal, G.2
Torres, F.3
Verd, J.4
Perez-Murano, F.5
Barniol, N.6
-
18
-
-
33751105915
-
System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection
-
DOI 10.1016/j.sna.2006.04.002, PII S0924424706002780
-
M. Villarroya J. Verd J. Teva G. Abadal E. Forsen F.P. Murano A. Uranga E. Figueras J. Montserrat J. Esteve A. Boisen N. Barniol 2006 System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection Sensors Actuators A: Physical 132 154 164 10.1016/j.sna.2006.04.002 (Pubitemid 44767544)
-
(2006)
Sensors and Actuators, A: Physical
, vol.132
, Issue.1 SPEC. ISS.
, pp. 154-164
-
-
Villarroya, M.1
Verd, J.2
Teva, J.3
Abadal, G.4
Forsen, E.5
Murano, F.P.6
Uranga, A.7
Figueras, E.8
Montserrat, J.9
Esteve, J.10
Boisen, A.11
Barniol, N.12
-
19
-
-
23844450347
-
Electrostatically actuated resonant microcantilever beam in CMOS technology for the detection of chemical weapons
-
DOI 10.1109/JSEN.2005.851016
-
I. Voiculescu M.E. Zaghloul R.A. McGill E.J. Houser G.K. Fedder 2005 Electrostatically actuated resonant microcantilever beam in CMOS technology for the detection of chemical weapons IEEE Sensors 5 641 647 10.1109/JSEN.2005. 851016 (Pubitemid 41164477)
-
(2005)
IEEE Sensors Journal
, vol.5
, Issue.4
, pp. 641-647
-
-
Voiculescu, I.1
Zaghloul, M.E.2
Mcgill, R.A.3
Houser, E.J.4
Fedder, G.K.5
-
20
-
-
0242636509
-
A reduced-order model for electrically actuated microbeam-based MEMS
-
10.1109/JMEMS.2003.818069
-
M.I. Younis E.M. Abdel-Rahman A.H. Nayfeh 2003 A reduced-order model for electrically actuated microbeam-based MEMS Microelectromech. Syst. 12 672 680 10.1109/JMEMS.2003.818069
-
(2003)
Microelectromech. Syst.
, vol.12
, pp. 672-680
-
-
Younis, M.I.1
Abdel-Rahman, E.M.2
Nayfeh, A.H.3
-
21
-
-
1942532727
-
A 2-D microcantilever array for multiplexed biomolecular analysis
-
10.1109/JMEMS.2003.823216
-
M. Yue H. Lin D.E. Dedrick S. Satyanarayana A. Majumdar A.S. Bedekar J.W. Jenkins S. Sundaram 2004 A 2-D microcantilever array for multiplexed biomolecular analysis Microelectromech. Syst. 13 290 299 10.1109/JMEMS.2003. 823216
-
(2004)
Microelectromech. Syst.
, vol.13
, pp. 290-299
-
-
Yue, M.1
Lin, H.2
Dedrick, D.E.3
Satyanarayana, S.4
Majumdar, A.5
Bedekar, A.S.6
Jenkins, J.W.7
Sundaram, S.8
-
22
-
-
24644488706
-
Micromachined acoustic resonant mass sensor
-
DOI 10.1109/JMEMS.2005.845405
-
H. Zhang E.S. Kim 2005 Micromachined acoustic resonant mass sensor Microelectromech. Syst. 14 699 706 10.1109/JMEMS.2005.845405 (Pubitemid 41488589)
-
(2005)
Journal of Microelectromechanical Systems
, vol.14
, Issue.4
, pp. 699-706
-
-
Zhang, H.1
Kim, E.S.2
-
23
-
-
0037735354
-
A novel MEMS gas sensor with effective combination of high sensitivity and high selectivity
-
Zhou's, J., Lil, P., Zhang, S., Zhou, F., Huang, Y., Yan, P., Bao, M.: A novel MEMS gas sensor with effective combination of high sensitivity and high selectivity. In: Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, vol. 10, pp. 471-477 (2002)
-
(2002)
Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics
, vol.10
, pp. 471-477
-
-
Zhou'S, J.1
Lil, P.2
Zhang, S.3
Zhou, F.4
Huang, Y.5
Yan, P.6
Bao, M.7
|