Two- and three-dimensional micro- and Suβmicrometer periodic structures using two-beam laser interference lithography

Advanced Engineering Materials

Volumn 12, Issue 1-2, 2010, Pages 54-60

  Lasagni, A F ^a   Menendez Ormaza B S ^a  

^a FRAUNHOFER INSTITUTE FOR MATERIAL AND BEAM TECHNOLOGY IWS   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

3D STRUCTURE; COMPLEX STRUCTURE; FABRICATED STRUCTURES; LASER INTERFERENCE LITHOGRAPHY; LAYER-BY-LAYER APPROACHES; NUMERICAL CALCULATION; THREE-DIMENSIONAL STRUCTURE; TWO-BEAM INTERFERENCE;

BIOMIMETICS; FABRICATION; PHOTOLITHOGRAPHY;

THREE DIMENSIONAL;

EID: 77449119342     PISSN: 14381656     EISSN: 15272648     Source Type: Journal    
DOI: 10.1002/adem.200900221     Document Type: Article

References (29)

1. N. Ganesh, I. D. Block, B. T. Cunningham, Appl. Phys. Lett. 2006, 89, 023901.
2. H. Yu, O. Balogun, B. Li, T. W. Murray, X. Zhang, J. Micromech. Microeng. 2004, 14, 1576.
3. W. H. Ryu, S. W. Min, K. E. Hammerick, M. Vyakarnam, R. S. Greco, F. B. Prinz, R. J. Fasching, Biomaterials 2007, 28, 1174.
4. S. N. Bhatia, C. S. Chen, Biomed. Microdev. 1999, 2, 131.
5. K. Hammerick, W. Ryu, R. Fasching, S. Bai, R. Smith, R. Greco, in: Nanoscale technology in biological systems (Eds: R. S. Greco, F. B. Prinz, R. S. Smith) Boca Raton, FL CRC Press, 2005, 73.
6. J. Zhang, S. Venkataramani, H. Xu, Y.-K. Song, H.-K. Song, G. Palmore, J. Fallon, A. V. Nurmikko, Biomaterials 2006, 27, 5734.
7. J. D. Joannopoulos, P. R. Villeneuve, S. Fan, Nature 1997, 386, 143.
8. M. Duarte, A. Lasagni, R. Giovanelli, J. Narciso, E. Louis, F. Mücklich, Adv. Eng. Mater. 2008, 10, 554.
9. A. Lasagni, M. R. Nejati, R. Clasen, F. Mücklich, Adv. Eng. Mater. 2006, 6, 580.
10. A. Bertsch, S. Jiguet, P. Renaud, J. Micromech. Microeng. 2004, 14, 197.
11. F. Meriche, E. Neiss-Clauss, R. Kremer, A. Boudrioua, E. Dogheche, E. Fogarassy, R. Mouras, A. Bouabellou, Appl. Surf. Sci. 2007, 254, 1327.
12. C. Ecoffet, A. Espanet, D. J. Lougnot, Adv. Mater 1998, 10, 411.
13. M. Campbell, D. N. Sharp, M. T. Harrison, R. G. Denning, A. J. Turberfield, Nature 2000, 404, 53.
14. T. Kondo, S. Juodkazis, V. Mizeikis, H. Misawa, Opt. Express 2006, 14, 7943.
15. Yu. V. Miklyaev, D. C. Meisel, A. Blanco, G. von Freymann, K. Busch, W. Koch, C. Enkrich, M. Deubel, M. Wegener, Appl. Phys. Lett. 2003, 82, 1284.
16. A. Lasagni, C. Holzapfel, T. Weirich, F. Mücklich, Appl. Surf. Sci. 2007, 253, 8070.
17. X. Zhu, Y. Xu, S. Yang, Opt. Express 2007, 15, 16546.
18. N. D. Lai, W. P. Liang, J. H. Lin, C. C. Hsu, C. H. Lin, Opt. Express 2005, 13, 9605.
19. C. Tan, C. S. Peng, V. N. Petryakov, Y. K. Verevkin, J. Zhang, Z. Wang, S. M. Olaizola, T. Berthou, S. Tisserand, M. Pessa, New J. Phys. 2008, 10, 023023.
20. L. E. Gutierrez-Rivera, L. Cescato, J. Micromech. Microeng. 2008, 18, 115003.
21. D. Wu, N. Fang, C. Sun, X. Zhang, Sens. Actuators, A 2006, 128, 109.
22. K. D. Vora, A. G. Peele, B. Y. Shew, E. C. Harvey, J. P. Hayes, Microsyst. Technol. 2007, 13, 487.
23. T. Itani, H. Yoshino, S. Hashimoto, M. Yamana, N. Samoto, K. Kasama, J. Vac. Sci. Technol, B 1996, 14, 4226.
24. L. D. Stefano, I. Rea, I. Rendina, M. D. Stefano, L. Moretti, Opt. Express 2007, 15, 18082.
25. V. C. Sundar, A. D. Yablon, J. L. Grazul, M. Ilan, J. Aizenberg, Nature 2003, 424, 899.
26. P. Vukusic, J. R. Sambles, Nature 2003, 424, 852.
27. A. F. Lasagni, D. Yuan, S. Das, Adv. Eng. Mater. 2009, 11, 408.
28. Y.-K. Yoon, J.-H. Park, M. G. Allen, J. Micromech. Microeng. 2006, 15, 1121.
29. H. Sato, T. Kakinuma, J. S. Go, S. Shoji, Sens. Actuators, A 2004, 111, 87.