Holographic lithography of periodic two-and three-dimensional microstructures in photoresist SU-8

Optics Express

Volumn 14, Issue 17, 2006, Pages 7943-7953

  Kondo, Toshiaki ^a   Juodkazis, Saulius ^a   Mizeikis, Vygantas ^a   Misawa, Hiroaki ^a   Matsuo, Shigeki ^b  

^a HOKKAIDO UNIVERSITY   (Japan)

^b UNIVERSITY OF TOKUSHIMA   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION; FLUIDICS; HOLOGRAPHY; LITHOGRAPHY; MICROSTRUCTURE; OPTICAL BEAM SPLITTERS; OPTICAL RESOLVING POWER;

HOLOGRAPHIC LITHOGRAPHY; MICRO-FLUIDIC SYSTEMS; THREE-DIMENSIONAL MICROSTRUCTURES;

PHOTORESISTS;

EID: 33747754793     PISSN: 10944087     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.14.007943     Document Type: Conference Paper

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