Stiction problems in releasing of 3D microstructures and its solution

Sensors and Actuators, A: Physical

Volumn 128, Issue 1, 2006, Pages 109-115

  Wu, Dongmin ^a   Fang, Nicholas ^a,b   Sun, Cheng ^a,c   Zhang, Xiang ^a,d  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

^d NSF Nano Scale Science and Engineering Center   (United States)

Author keywords

MEMS; Micro stereolithography; Photopolymerization; Surface tension

Indexed keywords

MICRO-STEREOLITHOGRAPHY; MONOMER RESIN;

CAPILLARY FLOW; LITHOGRAPHY; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; PHOTOPOLYMERIZATION; SUBLIMATION;

MICROSTRUCTURE;

EID: 33645136572     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.12.041     Document Type: Article

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