Distortion of 3D SU8 photonic structures fabricated by four-beam holographic lithography with umbrella configuration

Optics Express

Volumn 15, Issue 25, 2007, Pages 16546-16560

  Zhu, Xuelian ^a   Xu, Yongan ^a   Yang, Shu ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; OPTICAL FIBER FABRICATION; REFRACTION; SILICON;

FILM SHRINKAGE; FOUR-BEAM HOLOGRAPHIC LITHOGRAPHY; HOLE ARRAY;

PHOTONIC CRYSTALS;

EID: 37149034653     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.15.016546     Document Type: Article

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