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Volumn 16, Issue 1, 2010, Pages 33-44

Silicon-on-insulator spectral filters fabricated with CMOS technology

Author keywords

Arrayed waveguide grating (AWG); Echelle grating; Nanophotonics; Photonic wire; Planar concave grating (PCG); Ring resonator; Silicon photonics; Silicon on insulator (SOI)

Indexed keywords

CONCAVE GRATING; ECHELLE GRATING; ECHELLE GRATINGS; PHOTONIC WIRES; RING RESONATOR; SILICON PHOTONICS; SILICON-ON-INSULATORS;

EID: 76949107074     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2009.2039680     Document Type: Article
Times cited : (488)

References (43)
  • 2
    • 76949105776 scopus 로고    scopus 로고
    • Sub-nanometer linewidth uniformity in silicon nano-photonic waveguide devices using cmos fabrication technology
    • to be published
    • S. Selvaraja, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, "Sub-nanometer linewidth uniformity in silicon nano-photonic waveguide devices using cmos fabrication technology," J. Sel. Top. Quantum Electron., to be published.
    • J. Sel. Top. Quantum Electron.
    • Selvaraja, S.1    Bogaerts, W.2    Dumon, P.3    Van Thourhout, D.4    Baets, R.5
  • 3
    • 69849110033 scopus 로고    scopus 로고
    • Fabrication of photonic wire and crystal circuits in silicon-oninsulator using 193nm optical lithography
    • Sep.
    • S. Selvaraja, P. Jaenen, W. Bogaerts, D. Van Thourhout, P. Dumon, and R. Baets, "Fabrication of photonic wire and crystal circuits in silicon-oninsulator using 193nm optical lithography," J. Lightw. Technol., vol.27, no.18, pp. 4076-4083, Sep. 2009.
    • (2009) J. Lightw. Technol. , vol.27 , Issue.18 , pp. 4076-4083
    • Selvaraja, S.1    Jaenen, P.2    Bogaerts, W.3    Van Thourhout, D.4    Dumon, P.5    Baets, R.6
  • 4
    • 58149112665 scopus 로고    scopus 로고
    • Fabrication of uniform photonic devices using 193 nm optical lithography in siliconon-insulator
    • Eindhoven, Netherlands, FrB3
    • S. Selvaraja, W. Bogaerts, D. Van Thourhout, and R. Baets, "Fabrication of uniform photonic devices using 193 nm optical lithography in siliconon-insulator," Proc. 14th Eur. Conf. Integr. Opt. (ECIO), Eindhoven, Netherlands, FrB3, 2008.
    • (2008) Proc. 14th Eur. Conf. Integr. Opt. (ECIO)
    • Selvaraja, S.1    Bogaerts, W.2    Van Thourhout, D.3    Baets, R.4
  • 5
    • 37149010792 scopus 로고    scopus 로고
    • Ultracompact, low RF power, 10 gb/s silicon Mach-Zehnder modulator
    • Dec.
    • W. M. J. Green, M. J. Rooks, L. Sekaric, and Y. A. Vlasov, "Ultracompact, low RF power, 10 gb/s silicon Mach-Zehnder modulator," Opt. Exp., vol.15, no.25, pp. 17 106-17 113, Dec. 2007.
    • (2007) Opt. Exp. , vol.15 , Issue.25 , pp. 17106-17113
    • Green, W.M.J.1    Rooks, M.J.2    Sekaric, L.3    Vlasov, Y.A.4
  • 7
    • 34548614756 scopus 로고    scopus 로고
    • Compact InAlAs/InGaAs metal-semiconductor-metal photodetectors integrated on silicon-on-insulator waveguides
    • Oct.
    • J. Brouckaert, G. Roelkens, D. Van Thourhout, and R. Baets, "Compact InAlAs/InGaAs metal-semiconductor-metal photodetectors integrated on silicon-on-insulator waveguides," IEEE Photon. Technol. Lett., vol.19, no.19, pp. 1484-1486, Oct. 2007.
    • (2007) IEEE Photon. Technol. Lett. , vol.19 , Issue.19 , pp. 1484-1486
    • Brouckaert, J.1    Roelkens, G.2    Van Thourhout, D.3    Baets, R.4
  • 8
    • 34250209887 scopus 로고    scopus 로고
    • Siliconon-insulator microring resonator for sensitive and label-free biosensing
    • K. De Vos, I. Bartolozzi, E. Schacht, P. Bienstman, and R. Baets, "Siliconon-insulator microring resonator for sensitive and label-free biosensing," Opt. Exp., vol.15, no.12, pp. 7610-7615, 2007.
    • (2007) Opt. Exp. , vol.15 , Issue.12 , pp. 7610-7615
    • De Vos, K.1    Bartolozzi, I.2    Schacht, E.3    Bienstman, P.4    Baets, R.5
  • 12
    • 34248524425 scopus 로고    scopus 로고
    • Planar concave grating demultiplexer fabricated on a nanophotonic silicon-on-insulator platform
    • DOI 10.1109/JLT.2007.893025
    • J. Brouckaert, W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, "Planar concave grating demultiplexer fabricated on a nanophotonic silicon-on-insulator platform," J. Lightw. Technol., vol.25, no.5, pp. 1269-1275, May 2007. (Pubitemid 46746204)
    • (2007) Journal of Lightwave Technology , vol.25 , Issue.5 , pp. 1269-1275
    • Brouckaert, J.1    Bogaerts, W.2    Dumon, P.3    Van Thourhout, D.4    Baets, R.5
  • 13
    • 58149112665 scopus 로고    scopus 로고
    • Fabrication of uniform photonic devices using 193nm optical lithography in silicon-oninsulator
    • presented at Eindhoven, The Netherlands
    • S. Selvaraja,W. Bogaerts,D.Van Thourhout, and R. Baets, "Fabrication of uniform photonic devices using 193nm optical lithography in silicon-oninsulator," presented at the ser. Eur. Conf. Integr. Opt. (ECIO), Eindhoven, The Netherlands, 2008.
    • (2008) The Ser. Eur. Conf. Integr. Opt. (ECIO)
    • Selvaraja, S.1    Bogaerts, W.2    Van Thourhout, S.3    Baets, R.4
  • 15
    • 39749086538 scopus 로고    scopus 로고
    • Low-loss, low-crosstalk crossings for SOI nanophotonic waveguides
    • Oct.
    • W. Bogaerts, P. Dumon, D. Van Thourhout, and R. Baets, "Low-loss, low-crosstalk crossings for SOI nanophotonic waveguides," Opt. Lett., vol.32, no.19, pp. 2801-2803, Oct. 2007.
    • (2007) Opt. Lett. , vol.32 , Issue.19 , pp. 2801-2803
    • Bogaerts, W.1    Dumon, P.2    Van Thourhout, D.3    Baets, R.4
  • 17
    • 42649100999 scopus 로고    scopus 로고
    • Ultrasmall thermally tunable microring resonator with a submicrometer heater on Si nanowires
    • Mar.
    • D. Dai, L. Yang, and S. He, "Ultrasmall thermally tunable microring resonator with a submicrometer heater on Si nanowires," J. Lightw. Technol., vol.26, no.5-8, pp. 704-709, Mar. 2008.
    • (2008) J. Lightw. Technol. , vol.26 , Issue.5-8 , pp. 704-709
    • Dai, D.1    Yang, L.2    He, S.3
  • 18
    • 34548173954 scopus 로고    scopus 로고
    • Temperature dependence of silicon nanophotonic ring resonator with a polymeric overlayer
    • Aug.
    • J.-M. Lee, D.-J. Kim, H. Ahn, S.-H. Park, and G. Kim, "Temperature dependence of silicon nanophotonic ring resonator with a polymeric overlayer," J. Lightw. Technol., vol.25, no.8, pp. 2236-2243, Aug. 2007.
    • (2007) J. Lightw. Technol. , vol.25 , Issue.8 , pp. 2236-2243
    • Lee, J.-M.1    Kim, D.-J.2    Ahn, H.3    Park, S.-H.4    Kim, G.5
  • 19
    • 69049102082 scopus 로고    scopus 로고
    • Athermal silicon-on-insulator ring resonators by overlaying a polymer cladding on narrowed waveguides
    • Aug.
    • J. Teng, P. Dumon, W. Bogaerts, H. Zhang, X. Jian, X. Han, M. Zhao, G. Morthier, and R. Baets, "Athermal silicon-on-insulator ring resonators by overlaying a polymer cladding on narrowed waveguides," Opt. Exp., vol.17, no.17, pp. 14 627-14 633, Aug. 2009.
    • (2009) Opt. Exp. , vol.17 , Issue.17 , pp. 14627-14633
    • Teng, J.1    Dumon, P.2    Bogaerts, W.3    Zhang, H.4    Jian, X.5    Han, X.6    Zhao, M.7    Morthier, G.8    Baets, R.9
  • 21
    • 27744470491 scopus 로고    scopus 로고
    • Optical bistability and pulsating behaviour in silicon-oninsulator ring resonator structures
    • Nov.
    • G. Priem, P. Dumon, W. Bogaerts, D. Van Thourhout, G. Morthier, and R. Baets, "Optical bistability and pulsating behaviour in silicon-oninsulator ring resonator structures," Opt. Exp., vol.13, no.23, pp. 9623-9628, Nov. 2005.
    • (2005) Opt. Exp. , vol.13 , Issue.23 , pp. 9623-9628
    • Priem, G.1    Dumon, P.2    Bogaerts, W.3    Van Thourhout, D.4    Morthier, G.5    Baets, R.6
  • 22
    • 0026219964 scopus 로고
    • An NxN optical multiplexer using a planar arrangement of two star couplers
    • Sep.
    • C. Dragone, "An NxN optical multiplexer using a planar arrangement of two star couplers," IEEE Photon. Technol. Lett., vol.3, no.9, pp. 812-814, Sep. 1991.
    • (1991) IEEE Photon. Technol. Lett. , vol.3 , Issue.9 , pp. 812-814
    • Dragone, C.1
  • 23
    • 33847160018 scopus 로고    scopus 로고
    • A polarization-diversity wavelength duplexer circuit in silicon-on-insulator photonic wires
    • DOI 10.1364/OE.15.001567
    • W. Bogaerts, D. Taillaert, P. Dumon, D. Van Thourhout, and R. Baets, "A polarization-diversity wavelength duplexer circuit in silicon-on-insulator photonic wires," Opt. Exp., vol.15, no.4, pp. 1567-1578, Feb. 2007. (Pubitemid 46280209)
    • (2007) Optics Express , vol.15 , Issue.4 , pp. 1567-1578
    • Bogaerts, W.1    Taillaert, D.2    Dumon, P.3    Van Thourhout, D.4    Baets, R.5    Pluk, E.6
  • 26
    • 0037028285 scopus 로고    scopus 로고
    • Low loss mode size converter from 0.3m square Si waveguides to singlemode fibres
    • T. Shoji, T. Tsuchizawa, T. Watanabe, K. Yamada, and H. Morita, "Low loss mode size converter from 0.3m square Si waveguides to singlemode fibres," Electron. Lett., vol.38, no.25, pp. 1669-1700, 2002.
    • (2002) Electron. Lett. , vol.38 , Issue.25 , pp. 1669-1700
    • Shoji, T.1    Tsuchizawa, T.2    Watanabe, T.3    Yamada, K.4    Morita, H.5
  • 27
    • 29244434528 scopus 로고    scopus 로고
    • Efficient silicon-on-insulator fiber coupler fabricated using 248nm deep UV lithography
    • Dec.
    • G. Roelkens, P. Dumon, W. Bogaerts, D. Van Thourhout, and R. Baets, "Efficient silicon-on-insulator fiber coupler fabricated using 248nm deep UV lithography," IEEE Photon. Technol. Lett., vol.17, no.12, pp. 2613-2615, Dec. 2005.
    • (2005) IEEE Photon. Technol. Lett. , vol.17 , Issue.12 , pp. 2613-2615
    • Roelkens, G.1    Dumon, P.2    Bogaerts, W.3    Van Thourhout, D.4    Baets, R.5
  • 28
    • 41649113524 scopus 로고    scopus 로고
    • High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit
    • G. Roelkens, D. Vermeulen, D. Vand thourhout, and R. Baets, "High efficiency diffractive grating couplers for interfacing a single mode optical fiber with a nanophotonic silicon-on-insulator waveguide circuit," Appl. Phys. Lett., vol.92, no.13, pp. 131101-1-131101-3, 2008.
    • (2008) Appl. Phys. Lett. , vol.92 , Issue.13 , pp. 1311011-1311013
    • Roelkens, G.1    Vermeulen, D.2    Vand Thourhout, D.3    Baets, R.4
  • 32
    • 38649115345 scopus 로고    scopus 로고
    • Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist
    • Jan.
    • M. Gnan, S. Thoms, D. Macintyre, R. De La Rue, and M. Sorel, "Fabrication of low-loss photonic wires in silicon-on-insulator using hydrogen silsesquioxane electron-beam resist," Electron. Lett., vol.44, no.2, pp. 115-116, Jan. 2008.
    • (2008) Electron. Lett. , vol.44 , Issue.2 , pp. 115-116
    • Gnan, M.1    Thoms, S.2    MacIntyre, D.3    De La Rue, R.4    Sorel, M.5
  • 33
    • 2942708124 scopus 로고    scopus 로고
    • Losses in single-mode silicon-on-insulator strip waveguides and bends
    • Apr.
    • Y. A. Vlasov and S. McNab, "Losses in single-mode silicon-on-insulator strip waveguides and bends," Opt. Exp., vol.12, no.8, pp. 1622-1631, Apr. 2004.
    • (2004) Opt. Exp. , vol.12 , Issue.8 , pp. 1622-1631
    • Vlasov, Y.A.1    McNab, S.2
  • 35
    • 35148850342 scopus 로고    scopus 로고
    • Low-loss multimode-interference-based crossings for silicon wire waveguides
    • Nov.
    • H. Chen and A. Poon, "Low-loss multimode-interference-based crossings for silicon wire waveguides," IEEE Photon. Technol. Lett., vol.18, no.21, pp. 2260-2262, Nov. 2006.
    • (2006) IEEE Photon. Technol. Lett. , vol.18 , Issue.21 , pp. 2260-2262
    • Chen, H.1    Poon, A.2
  • 38
    • 67049086632 scopus 로고    scopus 로고
    • Ultracompact SOI microring adddrop filter with wide bandwidth and wide FSR
    • May
    • A. Prabhu, A. Tsay, Z.Han, andV.Van, "Ultracompact SOI microring adddrop filter with wide bandwidth and wide FSR," IEEE Photon. Technol. Lett., vol.21, no.9-12, pp. 651-653, May 2009.
    • (2009) IEEE Photon. Technol. Lett. , vol.21 , Issue.9-12 , pp. 651-653
    • Prabhu, A.1    Tsay, A.2    Han, Z.3    Van, V.4
  • 40
    • 34648831811 scopus 로고    scopus 로고
    • Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects
    • Sep.
    • F. xia, M. Rooks, L. Sekaric, and Y. Vlasov, "Ultra-compact high order ring resonator filters using submicron silicon photonic wires for on-chip optical interconnects," Opt. Exp., vol.15, no.19, pp. 11 934-11 941, Sep. 2007.
    • (2007) Opt. Exp. , vol.15 , Issue.19 , pp. 11934-11941
    • Xia, F.1    Rooks, M.2    Sekaric, L.3    Vlasov, Y.4
  • 41
    • 34247354449 scopus 로고    scopus 로고
    • Ultracompact optical buffers on a silicon chip
    • Jan.
    • F. xia, L. Sekaric, and Y. Vlasov, "Ultracompact optical buffers on a silicon chip," Nature Photon., vol.1, no.1, pp. 65-71, Jan. 2007.
    • (2007) Nature Photon. , vol.1 , Issue.1 , pp. 65-71
    • Xia, F.1    Sekaric, L.2    Vlasov, Y.3
  • 43
    • 0038029580 scopus 로고    scopus 로고
    • Scattering at sidewall roughness in photonic crystal slabs
    • W. Bogaerts, P. Bienstman, and R. Baets, "Scattering at sidewall roughness in photonic crystal slabs," Opt. Lett., vol.28, no.9, pp. 689-691, 2003.
    • (2003) Opt. Lett. , vol.28 , Issue.9 , pp. 689-691
    • Bogaerts, W.1    Bienstman, P.2    Baets, R.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.