Compact InAlAs-InGaAs metal-semiconductor-metal photodetectors integrated on silicon-on-insulator waveguides

IEEE Photonics Technology Letters

Volumn 19, Issue 19, 2007, Pages 1484-1486

  Brouckaert, Joost ^a   Roelkens, Gunther ^a   Van Thourhout, Dries ^a   Baets, Roel ^a  

^a IMEC   (Belgium)

Author keywords

Heterogeneous integration; Photodetector; Photonic integrated circuit; Silicon on insulator (SOI)

Indexed keywords

PHOTODETECTORS; PHOTONIC DEVICES; SEMICONDUCTING INDIUM COMPOUNDS; SILICON ON INSULATOR TECHNOLOGY; THIN FILM CIRCUITS; WAFER BONDING; BUTENES; HETEROJUNCTIONS; INTEGRATED CIRCUITS; METALS; OPTOELECTRONIC DEVICES; SEMICONDUCTING INDIUM; SEMICONDUCTING SILICON; SILICON WAFERS; THIN FILM DEVICES; WAVEGUIDES;

HETEROGENEOUS INTEGRATION; PHOTONIC INTEGRATED CIRCUIT;

WAVEGUIDES; SEMICONDUCTING SILICON COMPOUNDS;

1550 NM; BENZOCYCLOBUTENE; HETEROGENEOUS INTEGRATION; INALAS; LOW TEMPERATURES; MEASUREMENT RESULTS; METAL SEMICONDUCTOR METAL PHOTODETECTOR; PHOTONIC INTEGRATED CIRCUITS; RESPONSIVITY; SILICON ON INSULATOR WAVEGUIDE; SILICON-ON-INSULATORS; SOI SUBSTRATES;

EID: 34548614756     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2007.903767     Document Type: Article

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