Order of reaction between photoresist and atomic hydrogen generated by a tungsten hot-wire catalyst

Applied Physics Express

Volumn 3, Issue 2, 2010, Pages

  Yamamoto, Masashi ^a   Maruoka, Takeshi ^a   Kono, Akihiko ^a   Horibe, Hideo ^a   Umemoto, Hironobu ^b  

^a KANAZAWA INSTITUTE OF TECHNOLOGY   (Japan)

^b SHIZUOKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC HYDROGEN; ATOMIC HYDROGEN DENSITY; FIRST ORDER KINETICS; HYDROGEN MOLECULE; ORDER OF REACTION; PHOTORESIST REMOVAL; REACTION ORDERS;

ATOMS; CATALYSIS; CATALYSTS; PHOTORESISTORS; PHOTORESISTS; REACTION KINETICS; SURFACE TREATMENT; TUNGSTEN; WIRE;

HYDROGEN;

EID: 76949102649     PISSN: 18820778     EISSN: 18820786     Source Type: Journal    
DOI: 10.1143/APEX.3.026501     Document Type: Article

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