Technique for the production, preservation, and transportation of H atoms in metal chambers for processings

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 23, Issue 6, 2005, Pages 1728-1731

  Ansari, S G ^a   Umemoto, Hironobu ^a   Morimoto, Takashi ^a   Yoneyama, Koji ^a   Masuda, Atsushi ^a,c   Matsumura, Hideki ^a   Ikemoto, Manabu ^b   Ishibashi, Keiji ^b  

^a JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

^b ANELVA Corporation ^*  (Japan)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSIS; COATINGS; COOLING; DECOMPOSITION; LASER APPLICATIONS; MASS SPECTROMETRY; SCANNING ELECTRON MICROSCOPY; STAINLESS STEEL; X RAY PHOTOELECTRON SPECTROSCOPY;

CATALYTIC DECOMPOSITION; CHAMBER WALLS; LASER ABSORPTION TECHNIQUE;

HYDROGEN;

EID: 31144449165     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2101809     Document Type: Article

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