Differential scanning calorimetry measurements of kinetic factors involved in salicide process

Applied Physics Letters

Volumn 92, Issue 13, 2008, Pages

  Hoummada, K ^a   Portavoce, A ^a   Perrin Pellegrino, C ^a   Mangelinck, D ^a   Bergman, C ^a  

^a AIX MARSEILLE UNIVERSITY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; DIFFERENTIAL SCANNING CALORIMETRY; ENTHALPY; REACTION KINETICS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

DIFFERENTIAL SCANNING CALORIMETRY MEASUREMENTS; REACTION COEFFICIENTS; SALICIDE PROCESS;

CRYSTALLINE MATERIALS;

EID: 41649116235     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2905293     Document Type: Article

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