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Volumn 93, Issue 26, 2008, Pages
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Pt redistribution during Ni(Pt) silicide formation
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL GROWTH;
GRAIN BOUNDARIES;
GRAIN GROWTH;
GROWTH KINETICS;
NICKEL;
NICKEL COMPOUNDS;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SEMICONDUCTING SILICON COMPOUNDS;
SILICIDES;
SILICON;
CRYSTALLOGRAPHIC ORIENTATIONS;
NI SILICIDES;
PHASE REACTIONS;
RUTHERFORD BACKSCATTERINGS;
SI FILMS;
SILICIDE FORMATIONS;
PLATINUM;
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EID: 58149216198
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.3058719 Document Type: Article |
Times cited : (52)
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References (9)
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