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Applied Physics Letters

Volumn 92, Issue 25, 2008, Pages

Effect of stress on the transformation of Ni2Si into NiSi

(2) Mangelinck, Dominique a,b Hoummada, Khalid a,b

a AIX MARSEILLE UNIVERSITÉ (France)

b CNRS (France)

Author keywords

[No Author keywords available]

Indexed keywords

SILICIDES; X RAY DIFFRACTION;

EFFECT OF STRESS; INTRINSIC STRESS; REACTIVE DIFFUSION;

TIME DELAY;

EID: 46049101443 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2949751 Document Type: Article

Times cited : (24)

References (21)

1
- 0029488445
- R. Mukai, S. Ozawa, and H. Yagi, Thin Solid Films 270, 567 (1995).
- (1995) Thin Solid Films , vol.270 , pp. 567
- Mukai, R.¹ Ozawa, S.² Yagi, H.³

2
- 0032620901
- D. Mangelinck, J. Y. Dai, J. Pan, and S. K. Lahiri, Appl. Phys. Lett. 75, 1736 (1999).
- (1999) Appl. Phys. Lett. , vol.75 , pp. 1736
- Mangelinck, D.¹ Dai, J.Y.² Pan, J.³ Lahiri, S.K.⁴

3
- 0035691719
- P. S. Lee, K. L. Pey, D. Mangelinck, J. Ding, A. S. T. Wee, and L. Chan, IEEE Electron Device Lett. 22, 568 (2001).
- (2001) IEEE Electron Device Lett. , vol.22 , pp. 568
- Lee, P.S.¹ Pey, K.L.² Mangelinck, D.³ Ding, J.⁴ Wee, A.S.T.⁵ Chan, L.⁶

4
- 0000002371
- W. K. Chu, S. S. Lau, J. W. Mayer, H. Müller, and M.-A. Nicolet, Thin Solid Films 25, 393 (1975).
- (1975) Thin Solid Films , vol.25 , pp. 393
- Chu, W.K.¹ Lau, S.S.² Mayer, J.W.³ Müller, H.⁴ Nicolet, M.-A.⁵

5
- 0022561250
- F. M. d'Heurle and P. Gas, J. Mater. Res. 1, 205 (1986).
- (1986) J. Mater. Res. , vol.1 , pp. 205
- D'Heurle, F.M.¹ Gas, P.²

6
- 0142055828
- C. Lavoie, F. M. d'Heurle, C. Detavernier, and C. Cabral, Microelectron. Eng. 70, 144 (2003).
- (2003) Microelectron. Eng. , vol.70 , pp. 144
- Lavoie, C.¹ D'Heurle, F.M.² Detavernier, C.³ Cabral, C.⁴

7
- 33751307441
- C. Lavoie, C. Detavernier, C. Cabral, Jr., F. M. d'Heurle, A. J. Kellock, J. Jordan-Sweet, and J. M. E. Harper, Microelectron. Eng. 83, 2042 (2006).
- (2006) Microelectron. Eng. , vol.83 , pp. 2042
- Lavoie, C.¹ Detavernier, C.² Cabral Jr., C.³ D'Heurle, F.M.⁴ Kellock, A.J.⁵ Jordan-Sweet, J.⁶ Harper, J.M.E.⁷

8
- 33847687229
- D. Deduytsche, C. Detavernier, R. L. Van Meirhaeghe, J. L. Jordan-Sweet, and C. Lavoie, J. Appl. Phys. 101, 044508 (2007).
- (2007) J. Appl. Phys. , vol.101 , pp. 044508
- Deduytsche, D.¹ Detavernier, C.² Van Meirhaeghe, R.L.³ Jordan-Sweet, J.L.⁴ Lavoie, C.⁵

9
- 0141921378
- B. M. Haugerud, L. A. Bosworth, and R. E. Belford, J. Appl. Phys. 94, 4102 (2003).
- (2003) J. Appl. Phys. , vol.94 , pp. 4102
- Haugerud, B.M.¹ Bosworth, L.A.² Belford, R.E.³

10
- 8344236776
- S. E. Thompson, M. Armstrong, C. Auth, M. Alavi, M. Buehler, R. Chau, S. Cea, T. Ghani, G. Glass, T. Hoffman, C. H. Jan, C. Kenyon, J. Klaus, K. Kuhn, Z. Y. Ma, B. Mcintyre, K. Mistry, A. Murthy, B. Obradovic, R. Nagisetty, P. Nguyen, S. Sivakumar, R. Shaheed, L. Shiften, B. Tufts, S. Tyagi, M. Bohr, and Y. El-Mansy, IEEE Trans. Electron Devices 51, 1790 (2004).
- (2004) IEEE Trans. Electron Devices , vol.51 , pp. 1790
- Thompson, S.E.¹ Armstrong, M.² Auth, C.³ Alavi, M.⁴ Buehler, M.⁵ Chau, R.⁶ Cea, S.⁷ Ghani, T.⁸ Glass, G.⁹ Hoffman, T.¹⁰ Jan, C.H.¹¹ Kenyon, C.¹² Klaus, J.¹³ Kuhn, K.¹⁴ Ma, Z.Y.¹⁵ McIntyre, B.¹⁶ Mistry, K.¹⁷ Murthy, A.¹⁸ Obradovic, B.¹⁹ Nagisetty, R.²⁰ more..

11
- 0002045702
- S. L. Zhang and F. M. d'Heurle, Thin Solid Films 213, 34 (1992).
- (1992) Thin Solid Films , vol.213 , pp. 34
- Zhang, S.L.¹ D'Heurle, F.M.²

12
- 17044454692
- F. M. d'Heurle and O. Thomas, Defect Diffus. Forum 129-130, 137 (1996).
- (1996) Defect Diffus. Forum , vol.129-130 , pp. 137
- D'Heurle, F.M.¹ Thomas, O.²

13
- 30744452497
- O. Thomas, P. Gergaud, C. Rivero, and F. M. d'Heurle, Defect Diffus. Forum 237-240, 518 (2005).
- (2005) Defect Diffus. Forum , vol.237-240 , pp. 518
- Thomas, O.¹ Gergaud, P.² Rivero, C.³ D'Heurle, F.M.⁴

14
- 0042011373
- P. Gergaud, O. Thomas, and B. Chenevier, J. Appl. Phys. 94, 1584 (2003).
- (2003) J. Appl. Phys. , vol.94 , pp. 1584
- Gergaud, P.¹ Thomas, O.² Chenevier, B.³

15
- 23744479414
- C. Rivero, P. Gergaud, M. Gailhanou, O. Thomas, B. Froment, H. Jaouen, and V. Carron, Appl. Phys. Lett. 87, 041904 (2005).
- (2005) Appl. Phys. Lett. , vol.87 , pp. 041904
- Rivero, C.¹ Gergaud, P.² Gailhanou, M.³ Thomas, O.⁴ Froment, B.⁵ Jaouen, H.⁶ Carron, V.⁷

16
- 13744257176
- F. Nemouchi, D. Mangelinck, C. Bergman, and P. Gas, Appl. Phys. Lett. 86, 041903 (2005).
- (2005) Appl. Phys. Lett. , vol.86 , pp. 041903
- Nemouchi, F.¹ Mangelinck, D.² Bergman, C.³ Gas, P.⁴

17
- 34250191784
- O. Cojocaru-Miŕdin, D. Mangelinck, K. Hoummada, E. Cadel, D. Blavette, B. Deconihout, and C. Perrin-Pellegrino, Scr. Mater. 57, 373 (2007).
- (2007) Scr. Mater. , vol.57 , pp. 373
- Cojocaru-Miŕdin, O.¹ Mangelinck, D.² Hoummada, K.³ Cadel, E.⁴ Blavette, D.⁵ Deconihout, B.⁶ Perrin-Pellegrino, C.⁷

18
- 0027906621
- F. Corni, B. G. Gregorio, G. Ottaviani, G. Queirolo, and J. P. Follegot, Appl. Surf. Sci. 73, 197 (1993).
- (1993) Appl. Surf. Sci. , vol.73 , pp. 197
- Corni, F.¹ Gregorio, B.G.² Ottaviani, G.³ Queirolo, G.⁴ Follegot, J.P.⁵

19
- 0010916138
- W. C. Johnson and G. Martin, Solid State Phenom. 3-4, 247 (1988).
- (1988) Solid State Phenom. , vol.3-4 , pp. 247
- Johnson, W.C.¹ Martin, G.²

20
- 0000651153
- W. C. Johnson and G. Martin, J. Appl. Phys. 68, 1252 (1990).
- (1990) J. Appl. Phys. , vol.68 , pp. 1252
- Johnson, W.C.¹ Martin, G.²

21
- 0141788360
- M. Backhaus-Ricoult, Annu. Rev. Mater. Res. 33, 55 (2003).
- (2003) Annu. Rev. Mater. Res. , vol.33 , pp. 55
- Backhaus-Ricoult, M.¹

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