Germanium on insulator near-infrared photodetectors fabricated by layer transfer

Thin Solid Films

Volumn 518, Issue 9, 2010, Pages 2501-2504

  Sorianello, V ^a   De Iacovo, A ^a   Colace, L ^a   Assanto, G ^a   Fulgoni, D ^b   Nash, L ^b   Palmer, M ^b  

^a ROMA TRE UNIVERSITY   (Italy)

^b Barclays   (United Kingdom)

Author keywords

Germanium; Layer transfer; Photodetectors; Wafer bonding

Indexed keywords

GERMANIUM ON INSULATORS; LAYER TRANSFER; LOW TEMPERATURE EPITAXIAL GROWTH; NEAR INFRARED; PHOTOVOLTAIC MODES; RESPONSIVITY; REVERSE BIAS; REVERSE VOLTAGES;

FABRICATION; GERMANIUM; HETEROJUNCTION BIPOLAR TRANSISTORS; OPTOELECTRONIC DEVICES; PHOTODETECTORS; SILICON WAFERS;

WAFER BONDING;

EID: 76249114875     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.09.134     Document Type: Article

References (23)

1. Masini G., Colace L., and Assanto G. Mat. Sci. Engin. B 89 (2002) 2
2. Yin T., Cohen R., Morse M.M., Sarid G., Chetrit Y., Rubin D., and Paniccia M.J. Opt. Express 15 (2007) 13965
3. Ahn D., Hong C., Ahn D., Hong C., Liu J., Giziewicz W., Beals M., Kimerling L.C., Michel J., Chen J., and Kärtner F.X. Opt. Express 15 (2007) 3916
4. Colace L., Balbi M., Masini G., Assanto G., Luan H.C., and Kimerling L.C. Appl. Phys. Lett. 88 (2006) 101111
5. Vivien L., Marris-Morini D., Fédéli J.M., Rouvière M., Damlencourt J., El Melhaoui L., Le Roux X., Crozat P., Mangeney J., Cassan E., and Lavall S. Appl. Phys. Lett. 92 (2008) 151114
6. Colace L., Masini G., Cencelli V., de Notaristefani F., and Assanto G. IEEE J. Quantum Electron. 43 (2007) 311
7. Masini G., Capellini G., Witzen J., and Gunn C. IEEE Intl. Conf. Group IV Photonics (2007) 1
8. Masini G., Colace L., Assanto G., Luan H.C., Wada K., and Kimerling L.C. IEEE Trans. Electron Devices. 48 (2001) 1092
9. Colace L., Masini G., Cencelli V., DeNotaristefani F., and Assanto G. Photonics Spectra 38 (2004) 88
10. Giovane L.M., Luan H.C., Agarwal A.M., and Kimerling L.C. Appl. Phys. Lett. 78 (2001) 541
11. Tezuka T., Sugiyama N., Mizuno Y., and Takagi S. Appl. Phys. Lett. 79 (2001) 1798
12. Nakaharai S., Tezuka T., Sugiyama N., Moriyama Y., and Takagi S. Appl. Phys. Lett. 83 (2003) 3516
13. Nguyen Q.T., Damlencourt J.F., Vincent B., Clavelier L., Morand Y., Gentil P., and Cristoloveanu S. Solid State Electron. 51 (2007) 1172
14. Liu Y., Deal M.D., and Plummer J.D. Appl. Phys. Lett. 84 (2004) 2563
15. Letertre F., Deguet C., Richtarch C., Faure B., Hartmann J.M., Chieu F., Beaumont A., Dechamp J., Morales C., Allibert F., Perreau P., Pocas S., Personnic S., Lagahe-Blanchard C., Ghyselen B., Le Vaillant Y.M., Jalaguier E., Kernevez N., and Mazure C. Mat. Res. Soc. Symp. Proc. (2004) 809
16. Yu C.Y., Lee C.Y., Lin C.H., and Liu C.W. Appl. Phys. Lett. 89 (2006) 101913
17. Lin C.H., Chyang Y.T., Hsu C.C., Lee C.H., Huang C.F., Lai C.H., Cheng T.H., and Liu C.W. Appl. Phys. Lett. 91 (2007) 041105
18. Chen L., Dong P., and Lipson M. Opt. Express 16 (2008) 11513
19. Chao Y., Scholz R., Reiche M., Gösele U., and Woo J.C. Jpn. J. Appl. Phys. 45 (2006) 8565
20. Min H.S., Joo Y.C., and Song O.S. J. Electron. Packag. 126 (2004) 120
21. Onsia B., Conard T., De Gendt S., Heyns M., Hoflijk I., Mertens P., Meuris M., Raskin G., Sioncke S., Teerlinck I., Theuwis A., Van Steenbergen J., and Vinckier C. Solid State Phenom. 103-104 (2005) 27
22. Colace L., Ferrara P., Assanto G., Fulgoni D., and Nash L. IEEE Photon. Technol. Lett. 19 (2007) 1813
23. Ishikawa Y., Wada K., Cannon D.D., Liu J., Luan H.C., and Kimerling L.C. Appl. Phys. Lett. 82 (2003) 2044