Evolution of structure and properties of multi-component (AlCrTaTiZr)Ox films

Thin Solid Films

Volumn 518, Issue 10, 2010, Pages 2732-2737

  Lin, Miao I ^a   Tsai, Ming Hung ^a   Shen, Wan Jui ^a   Yeh, Jien Wei ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Amorphous structure; Hard coating; High entropy alloy; Multi component oxide; Reactive sputtering

Indexed keywords

AMORPHOUS STRUCTURE; AMORPHOUS STRUCTURES; HIGH ENTROPY ALLOYS; MULTI-COMPONENT OXIDE; MULTI-COMPONENT OXIDES;

ALLOYS; AMORPHOUS FILMS; ENTROPY; HARD COATINGS; HARDNESS; MECHANICAL PROPERTIES; OXYGEN; ZIRCONIUM ALLOYS;

OXIDE FILMS;

EID: 76049095624     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.10.142     Document Type: Article

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