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Volumn 43, Issue 13, 2004, Pages 2670-2679

Mechanical characteristics of optical coatings prepared by various techniques: A comparative study

Author keywords

[No Author keywords available]

Indexed keywords

ABRASION; CHEMICAL VAPOR DEPOSITION; DATA REDUCTION; ELECTRON ABSORPTION; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; OPTICAL FILMS; OPTICAL SYSTEMS; OPTOELECTRONIC DEVICES; ULTRAVIOLET RADIATION; WAVEGUIDES;

EID: 2442598107     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.43.002670     Document Type: Article
Times cited : (60)

References (34)
  • 2
    • 84957280288 scopus 로고
    • A review of adhesion test methods for thin hard coatings
    • J. Valli, "A review of adhesion test methods for thin hard coatings," J. Vac. Sci. Technol. A 4, 3007-3014 (1986).
    • (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 3007-3014
    • Valli, J.1
  • 3
    • 85037677237 scopus 로고
    • Selected papers on characterization of optical coatings
    • SPIE, Bellingham, Wash.
    • M. R. Jacobson, ed., Selected Papers on Characterization of Optical Coatings, Vol. 63 of the SPIE Milestone Series (SPIE, Bellingham, Wash., 1992).
    • (1992) SPIE Milestone Series , vol.63
    • Jacobson, M.R.1
  • 5
    • 0001732549 scopus 로고
    • Adhesion of metal films produced by vacuum evaporation
    • O. S. Heavens, "Adhesion of metal films produced by vacuum evaporation," J. Phys. Radium 11, 355-359 (1950).
    • (1950) J. Phys. Radium , vol.11 , pp. 355-359
    • Heavens, O.S.1
  • 8
    • 0004565699 scopus 로고    scopus 로고
    • Plasma deposition and testing of hard coatings on plastics
    • R. d'Agostino, F. Fracassi, and P. Favia, eds. (Kluwer Academic, Dordrecht, The Netherlands)
    • L. Martinu, "Plasma deposition and testing of hard coatings on plastics," in Plasma Treatments and Deposition of Polymers, R. d'Agostino, F. Fracassi, and P. Favia, eds. (Kluwer Academic, Dordrecht, The Netherlands, 1997), pp. 247-272.
    • (1997) Plasma Treatments and Deposition of Polymers , pp. 247-272
    • Martinu, L.1
  • 10
    • 2442591205 scopus 로고    scopus 로고
    • Optical coatings on plastics
    • N. Kaiser and H. Pulker, eds. (Springer-Verlag, Berlin)
    • L. Martinu and J. E. Klemberg-Sapieha, "Optical coatings on plastics," in Optical Interference Coatings, N. Kaiser and H. Pulker, eds. (Springer-Verlag, Berlin, 2003), pp. 460-489.
    • (2003) Optical Interference Coatings , pp. 460-489
    • Martinu, L.1    Klemberg-Sapieha, J.E.2
  • 12
    • 2442429896 scopus 로고    scopus 로고
    • Film deposition methods
    • N. Kaiser and H. K. Pulker, eds. (Springer-Verlag, Berlin)
    • H. K. Pulker, "Film deposition methods," in Optical Interference Coatings, N. Kaiser and H. K. Pulker, eds. (Springer-Verlag, Berlin, 2003), pp. 131-153.
    • (2003) Optical Interference Coatings , pp. 131-153
    • Pulker, H.K.1
  • 15
    • 0034318489 scopus 로고    scopus 로고
    • Plasma deposition of optical films and coatings: A review
    • L. Martinu and D. Poitras, "Plasma deposition of optical films and coatings: a review," J. Vac. Sci. Technol. A 18, 2619-2645 (2000).
    • (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 2619-2645
    • Martinu, L.1    Poitras, D.2
  • 16
    • 0035881436 scopus 로고    scopus 로고
    • Review of the filtered arc process and materials deposition
    • P. J. Martin and A. Bendavid, "Review of the filtered arc process and materials deposition," Thin Solid Films 394, 1-15 (2001).
    • (2001) Thin Solid Films , vol.394 , pp. 1-15
    • Martin, P.J.1    Bendavid, A.2
  • 17
  • 19
    • 0028743151 scopus 로고
    • High-power 1.315 μm laser test of multilayer mirrors
    • Laser-Induced Damage in Optical Materials, J. Bennett, ed.
    • B. J. Pond, C. T. Du, S. Talley, K. C. Carniglia, J. J. McNally, and B. G. Charlton, "High-power 1.315 μm laser test of multilayer mirrors," in Laser-Induced Damage in Optical Materials: 1993, J. Bennett, ed., Proc. SPIE 2114, 335-344 (1994).
    • (1993) Proc. SPIE , vol.2114 , pp. 335-344
    • Pond, B.J.1    Du, C.T.2    Talley, S.3    Carniglia, K.C.4    McNally, J.J.5    Charlton, B.G.6
  • 23
    • 0034140213 scopus 로고    scopus 로고
    • Deposition and modification of titanium dioxide thin films by filtered arc deposition
    • A. Bendavid, P. J. Martin, and H. Takikawa, "Deposition and modification of titanium dioxide thin films by filtered arc deposition," Thin Solid Films 860, 241-250 (2000).
    • (2000) Thin Solid Films , vol.860 , pp. 241-250
    • Bendavid, A.1    Martin, P.J.2    Takikawa, H.3
  • 25
    • 0003855668 scopus 로고    scopus 로고
    • Metallic materials - Instrumented indentation test for hardness and materials parameters - Part 1: Test method
    • International Organization for Standardization, Geneva, Switzerland
    • International Organization for Standardization, "Metallic materials - instrumented indentation test for hardness and materials parameters - Part 1: Test method," International Standard ISO 14577-1 (International Organization for Standardization, Geneva, Switzerland, 2002).
    • (2002) International Standard ISO 14577-1
  • 26
    • 0026875935 scopus 로고
    • An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments
    • W. C. Oliver and G. M. Pharr, "An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments," J. Mater. Res. 7, 1564-1583 (1992).
    • (1992) J. Mater. Res. , vol.7 , pp. 1564-1583
    • Oliver, W.C.1    Pharr, G.M.2
  • 27
    • 84893998574 scopus 로고    scopus 로고
    • 2 film growth mechanism in low-pressure plasma by in situ real-time spectroscopic ellipsometry
    • to be published
    • 2 film growth mechanism in low-pressure plasma by in situ real-time spectroscopic ellipsometry," Thin Solid Films (to be published).
    • Thin Solid Films
    • Amassian, A.1    Desjardins, P.2    Martinu, L.3
  • 31
    • 0003545273 scopus 로고
    • O. Audello, A. Gras-Marti, J. A. Valles-Abarca, and D. L. Flamm, eds. (Kluwer Academic, Dordrecht, The Netherlands)
    • J. M. E. Harper, in Plasma-Surface Interactions and Processing of Materials, O. Audello, A. Gras-Marti, J. A. Valles-Abarca, and D. L. Flamm, eds. (Kluwer Academic, Dordrecht, The Netherlands, 1988).
    • (1988) Plasma-surface Interactions and Processing of Materials
    • Harper, J.M.E.1
  • 33
    • 0032370409 scopus 로고    scopus 로고
    • Development of a novel structure zone model relating to the closed-field unbalanced magnetron sputtering system
    • P. J. Kelly and R. D. Arnell, "Development of a novel structure zone model relating to the closed-field unbalanced magnetron sputtering system," J. Vac. Sci. Technol. A 16, 2858-2869 (1998).
    • (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 2858-2869
    • Kelly, P.J.1    Arnell, R.D.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.