Route for controlled growth of ultrathin polyimide films with Si-C bonding to Si(100)-2 × 1

Applied Surface Science

Volumn 144-145, Issue , 1999, Pages 339-343

  Bitzer, T ^a   Richardson, N V ^a  

^a UNIVERSITY OF ST ANDREWS   (United Kingdom)

Author keywords

Adsorption; Film growth; HREELS; Polyimides; Semiconductor

Indexed keywords

ADSORPTION; AMINES; CHEMICAL BONDS; CURING; DEPOSITION; ELECTRON SPECTROSCOPY; FILM GROWTH; INTERFACES (MATERIALS); ORGANIC ACIDS; POLYIMIDES; SEMICONDUCTING SILICON;

AMIC ACID FILM; CONTROLLED FORMATION; HIGH RESOLUTION ELECTRON ENERGY LOSS SPECTROSCOPY; IMIDISATION; MALEIC ANHYDRIDE; MOLECULAR DEPOSITION; ORGANIC FILM SUBSTRATE INTERFACE; PYROMELLITIC DIANHYDRIDE;

ULTRATHIN FILMS;

EID: 0032686789     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00823-X     Document Type: Article

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