Polymeric film deposition by ionization-assisted method for optical and optoelectronic applications

Thin Solid Films

Volumn 365, Issue 1, 2000, Pages 22-29

  Usui, H ^a  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; FILM GROWTH; IONIZATION; MONOMERS; OPTOELECTRONIC DEVICES; POLYMERIZATION; SUBSTRATES; SYNTHESIS (CHEMICAL); THIN FILMS;

IONIZATION-ASSISTED DEPOSITION (IAD); POLYUREA FILMS;

PLASTIC FILMS;

EID: 0033906590     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)01108-6     Document Type: Article

References (23)

1. Usui H., Yamada I., Takagi T. J. Vac. Sci. Technol. A. 4:1986;52.
2. Usui H., Kameda H., Tanaka K. Thin Solid Films. 288:1996;229.
3. Usui H., Tanaka K., Orito H., Sugiyama S. Jpn. J. Appl. Phys. 37:1998;987.
4. Thornton J.A., Greene J.E. Bunshah R.F. Handbook of Deposition Technologies for Films and Coatings. 1994;29 Noyes Publications, Nestwood, NJ.
5. Takagi T. Francombe M.H., Bossen J.L. Physics of Thin Films, Vol. 13. 1987;Academic Press, San Diego, CA.
6. Luff P.P., White M. Thin Solid Films. 6:1970;175.
7. Wittmann J.C., Hodge A.M., Lotz B. J. Polym. Sci. Polym. Phys. 21:1983;2495.
8. Nason T.C., Moore J.A., Lu T.-M. Appl. Phys. Lett. 60:1992;1866.
9. Blanchet G.B., Shah S.I. Appl. Phys. Lett. 62:1993;1026.
10. Salem J.R., Sequeda F.O., Duran J., Lee W.Y., Yang R.M. J. Vac. Sci. Technol. A. 4:1986;369.
11. Takahashi Y., Iijima M., Inagawa K., Itoh A. J. Vac. Sci. Technol. A. 5:1987;2253.
12. Tamada M., Omichi H., Okui N. Thin Solid Films. 251:1994;36.
13. Usui H., Numata K., Dohmoto H., Yamada I., Takagi T. Jaccodine R., Jackson K.A., Sundahl R.C. MRS Symp. Proc. Vol. 108 :1988;201.
14. Usui H., Koshikawa H., Tanaka K. J. Vac. Sci. Technol. A. 13:1995;2318.
15. Usui H., Koshikawa H., Tanaka K. IEICE Trans. Electron. E. 81C. 1998;1083.
16. Usui H., Kikuchi H., Tanaka T., Miyata S., Watanabe T. J. Vac. Sci. Technol. A. 16:1998;108.
17. Wang X.-S., Iijima M., Takahashi Y., Fukada E. Jpn. J. Appl. Phys. 32:1993;2768.
18. Usui H., Kikuchi H., Tanaka K., Miyata S., Watanabe T., Knoll W., Bock H. Tech. Dig. Ser. 14:1997;170.
19. Dentan V., Lévy Y., Dumont M., Robin P., Chastaing E. Opt. Comm. 69:1989;379.
20. Usui H., Kikuchi F., Tanaka K., Watanabe T., Miyata S. Sasaki K., Sasabe H., Kajzar F., Kuryk M. Extended Abstracts - 4th Int. Conf. Organic Non-linear Opt., Chitose, Japan, October 12-15. 1998;210.
21. Usui H., Kikuchi F., Tanaka K., et al. Non-linear Opt. 22. 1999;135.
22. Gorham W.F. J. Polym. Sci. A. 1:(4):1966;3027.
23. Tamada M., Koshikawa H., Hosoi F., et al. Polymer. 40:1999;3061.