Characterization of Low-k/Cu damascene structures using monoenergetic positron beams

Japanese Journal of Applied Physics

Volumn 48, Issue 12, 2009, Pages

  Uedono, Akira ^a,b   Inoue, Naoya ^a,b   Hayashi, Yoshihiro ^a,b   Eguchi, Kazuhiro ^a,b   Nakamura, Tomoji ^a,b   Hirose, Yukinori ^a,b   Yoshimaru, Masaki ^a,b   Oshima, Nagayasu ^a,c   Ohdaira, Toshiyuki ^a,c   Suzuki, Ryoichi ^a,c  

^a UNIVERSITY OF TSUKUBA   (Japan)

^b SEMICONDUCTOR TECHNOLOGY ACADEMIC RESEARCH CENTER   (Japan)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNIHILATION RADIATIONS; DAMASCENE STRUCTURE; DOPPLER BROADENING SPECTRA; FABRICATION PROCESS; LINE SHAPE PARAMETERS; MONOENERGETIC POSITRON BEAM; POSITRON LIFETIME SPECTRA;

PARTICLE BEAMS;

POSITRONS;

EID: 75149178124     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.48.120222     Document Type: Article

References (17)

1. S. P. Murarka: Mater. Sci. Eng. R 19 (1997) 87.
2. K. Maex, M. R. Baklanov, D. Shamiryan, and F. Lacopi: J. Appl. Phys. 93 (2003) 8793.
3. R. Krause-Rehberg and H. S. Leipner: Positron Annihilation in Semiconductors (Springer, Berlin, 1999) Vol. 127.
4. Positron and Positronium Chemistry, ed. Y. C. Jean, P. E. Mallon, and D. M. Schrader (World Scientific, Singapore, 2003).
5. M. P. Petkov, M. H. Weber, K. G. Lynn, K. P. Rodbell, and S. A. Cohen: Appl. Phys. Lett. 74 (1999) 2146.
6. T. L. Dull, W. E. Frieze, D. W. Gidley, J. N. Sun, and A. F. Yee: J. Phys. Chem. 105 (2001) 4657.
7. A. Uedono, Z. Q. Chen, R. Suzuki, T. Ohdaira, T. Mikado, S. Fukui, A. Shiota, and S. Kimura: J. Appl. Phys. 90 (2001) 2498.
8. R. S. Brusa, M. Spagolla, G. P. Karwasz, A. Zecca, G. Ottaviani, F. Corni, M. Bacchetta, and E. Carollo: J. Appl. Phys. 95 (2004) 2348.
9. G. W. Gidley, H. G. Peng, and R. S. Vallery: Annu. Rev. Mater. Res. 36 (2006) 49.
10. A. Uedono, T. Suzuki, T. Nakamura, T. Ohdaira, and R. Suzuki: J. Appl. Phys. 98 (2005) 043504.
11. F. Ito, T. Takeuchi, H. Yamamoto, T. Ohdaira, R. Suzuki, and Y. Hayashi: Proc. Advanced Metallization Conf., 2007, p. 465.
12. K. Hijioka, F. Ito, M. Tagami, H. Ohtake, Y. Harada, T. Takeuchi, S. Saito, and Y. Hayashi: Jpn. J. Appl. Phys. 43 (2004) 1807.
13. N. Oshima, R. Suzuki, T. Ohdaira, A. Kinomura, T. Narumi, A. Uedono, and M. Fujinami: J. Appl. Phys. 103 (2008) 094916.
14. R. B. Gregory: Nucl. Instrum. Methods Phys. Res., Sect. A 302 (1991) 496.
15. A. Uedono, L. Wei, S. Tanigawa, R. Suzuki, H. Ohgaki, T. Mikado, and Y. Ohji: J. Appl. Phys. 75 (1994) 3822.
16. T. L. Dull, W. E. Frieze, D. W. Gidley, J. N. Sun, and A. Y. Yee: J. Phys. Chem. B 105 (2001) 4657.
17. A. Uedono, T. Kawano, S. Tanigawa, and H. Itoh: J. Phys.: Condens. Matter 6 (1994) 8669.