Pore-connectivity dependence of moisture absorption into porous low-k films by positron-annihilation lifetime spectroscopy

Advanced Metallization Conference (AMC)

Volumn , Issue , 2008, Pages 465-470

  Ito, Fuminori ^a   Takeuchi, Tsuneo ^a   Yamamoto, Hironori ^a   Ohdaira, Toshiyuki ^b   Suzuki, Ryoichi ^b   Hayashi, Yoshihiro ^a  

^a NEC CORPORATION   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; ELECTRIC CURRENTS; MATERIALS PROPERTIES; METALLIZING; MOISTURE; PLASMAS; PORE SIZE; POSITRON ANNIHILATION SPECTROSCOPY; POSITRONS; SUPERCONDUCTING MATERIALS;

HUMID CONDITIONS; LIFETIME SPECTROSCOPIES; LOW-K MATERIALS; MOISTURE ABSORPTIONS; PORE PROPERTIES; POROUS FILMS; POSITRON ANNIHILATION LIFETIME SPECTROSCOPIES;

ABSORPTION SPECTROSCOPY;

EID: 55349084019     PISSN: 15401766     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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