Characterization and properties of TiN-containing amorphous Ti-Si-N nanocomposite coatings prepared by arc assisted middle frequency magnetron sputtering

Vacuum

Volumn 84, Issue 6, 2010, Pages 817-822

  Zou, C W ^a   Wang, H J ^a   Li, M ^a   Yu, Y F ^a   Liu, C S ^a   Guo, L P ^a   Fu, D J ^a  

^a WUHAN UNIVERSITY   (China)

Author keywords

Friction coefficient; Hardness; Middle frequency magnetron sputtering; Ti Si N nanocomposite coatings

Indexed keywords

AMORPHOUS SI; FRICTION COEFFICIENT; FRICTION COEFFICIENTS; HIGH HARDNESS; HIGH-RESOLUTION TEM; LOW FRICTION COEFFICIENTS; MAGNETRON SPUTTERING SYSTEMS; MATRIX; NANO-COMPOSITE COATING; OPTIMUM CONDITIONS; SUBSTRATE TEMPERATURE; TI-SI-N; TIN NANOCRYSTALS; TOTAL GAS PRESSURE; TRIBOLOGICAL PERFORMANCE; XPS; XRD;

CAVITY RESONATORS; COATINGS; FRICTION; HARDNESS; INDUSTRIAL APPLICATIONS; MAGNETRON SPUTTERING; MAGNETRONS; MECHANICAL PROPERTIES; NANOCOMPOSITES; TITANIUM NITRIDE; TRIBOLOGY;

AMORPHOUS SILICON;

EID: 75049085391     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2009.10.050     Document Type: Article

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