Characterization of the evaporation behavior of a β-SiC target during electron beam-physical vapor deposition

Journal of Alloys and Compounds

Volumn 491, Issue 1-2, 2010, Pages 436-440

  Yi, Jian ^a,b   He, XiaoDong ^b   Sun, Yue ^b  

^a TAIZHOU UNIVERSITY   (China)

^b HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Carbides; Microstructure; Vapor deposition; X ray diffraction

Indexed keywords

CONCENTRATION OF; DIAMOND-LIKE CARBON; ELECTRON BEAM-PHYSICAL VAPOR DEPOSITION; MOLTEN POOL; MULTI-FUNCTIONS; PREFERRED ORIENTATIONS; SIC GRAINS; THREE ZONES;

CORROSION; DIFFRACTION; ELECTRON BEAMS; ELECTRON PROBE MICROANALYSIS; ELECTRONS; EVAPORATION; HEAT AFFECTED ZONE; MARTENSITIC STAINLESS STEEL; MICROSTRUCTURE; PHYSICAL VAPOR DEPOSITION; PROTECTIVE COATINGS; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE; STAINLESS STEEL; TARGETS; VAPORS; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 74649084826     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2009.10.218     Document Type: Article

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