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Volumn 91, Issue 24, 2007, Pages
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Surface hardness enhancement in s p3-bonded carbon doped SiC nanocomposite films
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Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRON BEAMS;
HARDNESS;
SILICON CARBIDE;
VAPOR DEPOSITION;
DIAMONDLIKE CARBON COMPOSITES;
HYSITRON INDENTATION;
SUPERHARDNESS;
NANOCOMPOSITES;
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EID: 37149044728
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2824811 Document Type: Article |
Times cited : (6)
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References (22)
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