Synthesis and characterisation of nitrogen-doped ZnO thin films

International Journal of Nano and Biomaterials

Volumn 2, Issue 1-5, 2009, Pages 216-225

  Mekki, Abdelkrim ^a   Tabet, Nouar ^a   Hezam, Mahmoud ^a  

^a KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS   (Saudi Arabia)

Author keywords

DC magnetron; Nanotechnology; Nitrogen doped zinc oxide; ZnO thin films

Indexed keywords

ATOMIC FORCE MICROSCOPY; BINDING ENERGY; DOPING (ADDITIVES); FILM PREPARATION; II-VI SEMICONDUCTORS; METALLIC FILMS; NANOTECHNOLOGY; OPTICAL FILMS; OXIDE FILMS; TEXTURES; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC OXIDE;

ATOMIC NITROGEN; DC MAGNETRON SPUTTERING TECHNIQUE; HIGH OXYGENS; NITROGEN-DOPED; OXYNITRIDES; SINGLE PEAK; XRD SPECTRA; ZNO THIN FILM;

THIN FILMS;

NANOMATERIAL; NITROGEN; OXYGEN; ZINC OXIDE;

ARTICLE; ATOMIC FORCE MICROSCOPY; CONTACT ANGLE; CONTROLLED STUDY; ENERGY; FILM; NANOTECHNOLOGY; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 73949146116     PISSN: 17528933     EISSN: 17528941     Source Type: Journal    
DOI: 10.1504/IJNBM.2009.027715     Document Type: Article

References (29)

1. 2 films modified by platinum doping', Thin Solid Films, Vol.219, p.7.
2. Bae, H.S., Yoon, M.H., Kim, J.H. and Im, S. (2003) 'Photodetecting properties of ZnO-based thin-film transistors', Appl. Phys. Lett., Vol.83, p.5313.
3. Banerjee, D., Rybczynski, J., Huang, J.Y., Wang, D.Z., Kempa, K. and Ren, Z.F. (2005) 'Large hexagonal arrays of aligned ZnO nanorods', Appl. Phys. A, Vol.80, p.749.
4. Bian, J.M., Li, X.M., Zhang, C.Y., Yu, W.D. and Gao, X.D. (2004) 'P-type ZnO films by monodoping of nitrogen and ZnO-based p-n homojunctions', Appl. Phys. Lett., Vol.85, p.4070.
5. Cho, S., Ma, J., Kim, Y., Sun, Y., Wong, G.K.L. and Ketterson, J.B. (1999) 'Photoluminescence and ultraviolet lasing of polycrystalline ZnO thin films prepared by the oxidation of the metallic Zn', Appl. Phys. Lett., Vol.75, p.2761.
6. Dang, H.Y., Wang, J. and Fan, S.S. (2003) 'The synthesis of metal oxide nanowires by directly heating metal samples in appropriate oxygen atmospheres', Nanotechnology, Vol.14, p.738.
7. Fan, H.J., Scholz, R., Kolb, F.M. and Zacharias, M. (2004) 'Two-dimensional dendritic ZnO nanowires from oxidation of Zn microcrystals', Appl. Phys. Lett., Vol.85, p.4142.
8. Guo, X.L., Tabata, H. and Hawai, T (2002) 'P-type conduction in transparent semiconductor ZnO thin films induced by electron cyclotron resonance N2O plasma', Opt. Mater., Vol.19, p.229.
9. Lee, H.W., Lau, S.P., Wang, Y.G., Tse, K.Y., Hng, H.H. and Tay, B.K. (2004) 'Structural, electrical and optical properties of Al-doped ZnO thin films prepared by filtered cathodic vacuum arc technique', J. Crystal Growth, Vol.268, p.596.
10. Li, S.B., Liu, Y.C., Zhi, Z.Z., Shen, D.Z., Lu, Y.M., Zhang, J.Y., Fan, X.W., Mu, R.X. and Henderson, D.O. (2003a) J. Mater. Res., Vol.18, p.8.
11. Li, X., Yan, Y., Gessert, T.A., Perkins, C.L., Young, D., DeHart, C., Young, M., and Coutts, T.J. (2003b) 'Chemical vapor deposition-formed p-type ZnO thin films', J. Vac. Sci. Technol. A, Vol.21, p.1342.
12. Look, D.C., Reynolds, D.C., Litton, C.W., Jones, R.L., Eason, D.B. and Cantwell, G. (2002) 'Characterization of homoepitaxial p-type ZnO grown by molecular beam epitaxy', Appl. Phys. Lett., Vol.81, p.1830.
13. Meng, L.J., Moreira de Sa, C.P. and Dos Santos, M.P. (1994) 'Study of the structure-properties of ZnO thin-films by x-ray photoelectron spectroscopy', Appl. Surf. Sci., Vol.78, p.57.
14. Meyer, B.K., Alves, H., Hofmann, D.M., Kriegseis, W., Forster, D., Bertram, F., Christen, J., Hoffmann, A., Strassburg, M., Dworzak, M., Haboeck, U. and Rodina, A.V. (2004) 'Bound exciton and donor-acceptor pair recombinations in ZnO', Phys. Status Solidi B, Vol.241, p.231.
15. Minegishi, K., Koiwai, Y. and Kikuchi, K. (1997) 'Growth of p-type zinc oxide films by chemical vapor deposition', Jpn. J. Appl. Phys., Part 2, p.36.
16. Moulder, J., Stickle, W.F., Sobol, P.E., Bomben, K.D. and Chastain, J. (1992) Handbook of X-Ray Photoelectron Spectroscopy, Perkin-Elmer.
17. Oh, B.Y., Jeong, M.C., Lee, W. and Myoung, J.M. (2005) 'Properties of transparent conductive ZnO: al films prepared by co-sputtering', J. Crystal Growth, Vol.274, p.453.
18. Park, W.I., Kim, J.S., Jung, S.W. and Yi, G.C. (2002) 'Metalorganic vapor-phase epitaxial growth of vertically well-aligned ZnO nanorods', Appl. Phys. Lett., Vol.80, p.4232.
19. Rommeluere, J.F., Svob, L., Jomard, F., Arroyo, J.M., Luzón, A., Ballet, V. and Marfaing, Y. (2003) 'Electrical activity of nitrogen acceptors in ZnO films grown by metalorganic vapor phase epitaxy', Appl. Phys. Lett., Vol.83, p.287.
20. Sernelius, B.E., Berggren, K.F., Jin, Z.C., Hamberg, I. and Granqvist, C.G. (1988) 'Band-gap tailoring of ZnO by means of heavy Al doping', Phys. Rev. E, Vol.37, p.10244.
21. Shinn, N.D. and Tsang, K.L. (1991) 'Strain-induced surface reactivity-low-temperature Cr/W(110) nitridation', J. Vac. Sci. Technol. A, Vol.9, p.1558.
22. Tabet, N., Faiz, M. and Al-Otaibi, A. (2007a) 'XPS study of nitrogen-implanted ZnO thin films obtained by DC-Magnetron reactive plasma', J. Electron Spect. Relat. Phenom.
23. Tabet, N., Faiz, M. and Otaibi, A.L. (2007b) 'Growth of ZnO nanostructures on Zinc and Pt Substrates', International J. Nanoscience, Vol.6, p.23.
24. Wang, X., Neff, C., Graugnard, E., Ding, Y., King, J.S., Prauger, L.A., Baum, R.T., Wang, Z.L. and Summers, C.J. (2005a) 'Photonic crystals fabricated using patterned nanorod arrays', Adv. Mater., Vol.17, p.2103.
25. Wang, X.D., Summers, C.J. and Wang, Z.L. (2005b) 'Self-attraction among aligned Au/ZnO nanorods under electron beam', Appl. Phys. Lett., Vol.86, p.13111.
26. Wang, Y.G., Lau, S.P., Lee, H.W., Yu, S.F., Tay, B.K., Zhang, X.H. and Hng, H.H. (2003) 'Photoluminescence study of ZnO films prepared by thermal oxidation of Zn metallic films in air', J. Appl. Phys., Vol.94, p.354.
27. Yan, Y., Zhang, S.B. and Pantelides, S.T. (2001) 'Control of doping by impurity chemical potentials: predictions for p-type ZnO', Phys. Rev. Lett., Vol.86, p.5723.
28. Yang, R. and Gao, L. (2005) 'Preparation and capacitances of oriented attachment CuO nanosheets and the MWNT/CuO nanocomposites', Solid State Communications, Vol.134, p.729.
29. Zamfirescu, M., Kavokin, A., Gil, B., Malpuech, G. and Kaliteevski, M. (2002) 'ZnO as a material mostly adapted for the realization of room-temperature polariton lasers', Phys. Rev. B, Vol.65 p.161205.