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Optical Materials

Volumn 19, Issue 1, 2002, Pages 229-233

P-Type conduction in transparent semiconductor ZnO thin films induced by electron cyclotron resonance N2O plasma

(3) Guo, Xin Li a Tabata, Hitoshi a Kawai, Tomoji a

a OSAKA UNIVERSITY (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRON CYCLOTRON RESONANCE; NITROGEN OXIDES; PLASMAS; SEMICONDUCTING FILMS; SEMICONDUCTOR DOPING; THIN FILMS; ZINC OXIDE;

PLASMA-ENHANCED PULSED LASER REACTIVE DEPOSITION;

OPTICAL FILMS;

EID: 0037012268 PISSN: 09253467 EISSN: None Source Type: Journal
DOI: 10.1016/S0925-3467(01)00224-5 Document Type: Article

Times cited : (55)

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