Nondestructive surface depth profiles from angle-resolved X-ray photoelectron spectroscopy data using the maximum entropy method. I. A new protocol

Journal of Physical Chemistry C

Volumn 113, Issue 51, 2009, Pages 21328-21337

  Scorciapino, M Andrea ^a   Navarra, Gabriele ^a   Elsener, Bernhard ^a   Rossi, Antonella ^a  

^a UNIVERSITY OF CAGLIARI   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ANGLE-RESOLVED X-RAY PHOTOELECTRON SPECTROSCOPY; CHEMICAL SPECIES CONCENTRATIONS; CONCENTRATION GRADIENTS; CONCENTRATION PROFILES; DEPTH PROFILE; EIGHT COMPONENT; ELECTRON INELASTIC MEAN FREE PATHS; EMISSION ANGLE; ILL POSED; IN-DEPTH PROFILING; ION SPUTTERING; ITERATIVE PROCEDURES; LAYER THICKNESS; LAYERED SURFACE; MATHEMATICAL PROBLEMS; MAXIMUM ENTROPY METHODS; NEW PROTOCOL; NON DESTRUCTIVE; NUMERICAL EXPERIMENTS; RESEARCH AND APPLICATION; SAMPLE SURFACE; SIGNAL INTENSITIES; SIMPLE PROFILES; THREE COMPONENT; XPS;

CONCENTRATION (PROCESS); DEPTH PROFILING; ELECTRONS; LAPLACE TRANSFORMS; MATHEMATICAL TRANSFORMATIONS; MICROELECTRONICS; PHOTOELECTRICITY; PHOTOIONIZATION; PHOTONS; SPUTTERING; SURFACES;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 73849120080     PISSN: 19327447     EISSN: 19327455     Source Type: Journal    
DOI: 10.1021/jp906326m     Document Type: Article

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